Mine alarm device based on CO2 and NO2 detection
An alarm device, CO2 technology, applied in mining devices, measuring devices, using sonic/ultrasonic/infrasonic waves to analyze fluids, etc., can solve the problems of gas detection defects, single function, etc., to ensure reliability, improve sensitivity, and increase adsorption. effect of ability
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Embodiment 1
[0042] This application provides a mine alarm device based on CO2 and NO2 detection, including a mine alarm device body and a monitoring CO installed outside the mine alarm device. 2 , NO 2 SAW sensor for gas concentration; such as figure 1 The schematic diagram of the SAW sensor structure is shown. The SAW sensor has a five-channel structure, wherein channel three is used as a reference channel, and the sensitive areas of channel one and channel two are coated with sensitive film material one (01) for CO 2 Gas detection; the sensitive area of channel 4 and channel 5 is coated with sensitive film material 2 (02) for NO 2 The detection of gas; the channel sensitive thin film materials one and two are three layers, and a layer of Ni film (03) is also magnetron sputtered between the sensitive thin film and the SAW device, and the thickness of the Ni film is 140nm; figure 2 show figure 1 The cross-sectional view of the coating sequence of Ni film and sensitive thin film mate...
Embodiment 2
[0061] This application provides a mine alarm device based on CO2 and NO2 detection, including a mine alarm device body and a monitoring CO installed outside the mine alarm device. 2 , NO 2 SAW sensor for gas concentration; such as figure 1 The schematic diagram of the SAW sensor structure is shown. The SAW sensor has a five-channel structure, wherein channel three is used as a reference channel, and the sensitive areas of channel one and channel two are coated with sensitive film material one (01) for CO 2 Gas detection; the sensitive area of channel 4 and channel 5 is coated with sensitive film material 2 (02) for NO 2 The detection of gas; the first and second channel sensitive film materials are three layers, and a layer of Ni film (03) is also magnetron sputtered between the sensitive film and the SAW device, and the thickness of the Ni film is 170nm; figure 2 show figure 1 The cross-sectional view of the coating sequence of Ni film and sensitive thin film material ...
Embodiment 3
[0079] This application provides a mine alarm device based on CO2 and NO2 detection, including a mine alarm device body and a monitoring CO installed outside the mine alarm device. 2 , NO 2 SAW sensor for gas concentration; such as figure 1 The schematic diagram of the SAW sensor structure is shown. The SAW sensor has a five-channel structure, wherein channel three is used as a reference channel, and the sensitive areas of channel one and channel two are coated with sensitive thin film material one (01) for CO 2 Gas detection; the sensitive area of channel 4 and channel 5 is coated with sensitive film material 2 (02) for NO 2 The detection of gas; the first and second channel sensitive film materials are three layers, and a layer of Ni film (03) is also magnetron sputtered between the sensitive film and the SAW device, and the thickness of the Ni film is 160nm; figure 2 show figure 1 The cross-sectional view of the coating sequence of Ni film and sensitive thin film mate...
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Abstract
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