A mems high-precision laser transmitter

Abstract

The invention relates to a MEMS high-precision laser transmitter, in particular to a high-precision laser transmitter based on a micro-electromechanical system (MEMS), and belongs to the field of optoelectronic technology. It includes a laser light source and a main reflector, the main reflector is a part of the spherical surface, the main reflector includes a main reflector support plate and a main reflector mirror surface, and it is characterized in that there is a secondary reflector between the laser light source and the main reflector, The secondary reflector is part of a spherical surface, and the mirror surface of the main reflector is composed of multiple MEMS deformable mirrors, each MEMS deformable mirror is connected to a controller, and the controller controls the attitude of each MEMS deformable mirror. A MEMS high-precision laser transmitter of the present invention includes two reflectors inlaid with MEMS deformable mirrors, MEMS deformable mirrors and corresponding controllers, which can not only ensure good focusing accuracy, but also effectively control the laser beam wavefront. Correction can also realize far-field synthesis of laser beams; the surface of the MEMS deformable mirror of the present invention is coated with a reflection film corresponding to the laser wavelength, and the reflection efficiency can reach more than 99.5%.

Description

technical field [0001] The invention relates to a MEMS high-precision laser transmitter, in particular to a high-precision laser transmitter based on a micro-electromechanical system (MEMS), and belongs to the field of optoelectronic technology. Background technique [0002] Traditional laser emission systems, such as the Cassegrain type emission system, focus the laser beam mainly through the adjustment of the main reflector. The adjustment range is very limited, and the focusing accuracy is on the micro-rad scale. After a transmission distance of kilometers, the focus error may be in the range of several meters, which greatly reduces the effectiveness of laser weapons. [0003] MEMS laser transmitter is a new type of transmitter used in laser weapon system, its performance directly determines the effect of laser remote focusing. Laser emitters using MEMS deformable mirrors not only have the function of laser wavefront correction, but also because each MEMS deformable mirr...

AI Technical Summary

Problems solved by technology

[0002] Traditional laser emission systems, such as the Cassegrain type emission system, focus the laser beam mainly through the adjustment of the main mirror. The adjustment range is very limited, and the focusing accuracy is on the micro-rad scale. After a transmission distance of kilometers, the focus error can be in the range of several meters, making the effectiveness of laser weapons greatly reduced

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