Coating machine
A coating machine and light distribution technology, applied in the field of coating machines, can solve the problems of occupying clean room space, increasing the edge exposure process, and increasing the risk of product defects, so as to save the edge exposure process, save equipment costs, reduce The effect of the risk of poor product
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[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.
[0022] refer to figure 1 and figure 2 ,in figure 1 A schematic structural view showing a linear nozzle 1 of a coating machine according to the present invention, figure 2 shows the substrate 2 after finishing the coating process according to the present invention, figure 2 The direction of the arrow in represents the advancing direction of the linear nozzle 1 . exist figure 1 Among them, the linear nozzle 1 is used to coat the photoresist 3 for the substrat...
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