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Coating machine

A coating machine and light distribution technology, applied in the field of coating machines, can solve the problems of occupying clean room space, increasing the edge exposure process, and increasing the risk of product defects, so as to save the edge exposure process, save equipment costs, reduce The effect of the risk of poor product

Inactive Publication Date: 2016-12-07
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, when investing in equipment during the construction stage, it is necessary to increase the equipment cost of purchasing the edge exposure machine, occupy the space of the clean room, and increase the construction cost of the clean room
And it is also necessary to increase the exposure process, increase the process flow, increase the overall equipment operating cost, and increase the risk of product failure in the process of increasing the process

Method used

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Embodiment Construction

[0021] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without creative efforts fall within the protection scope of the present invention.

[0022] refer to figure 1 and figure 2 ,in figure 1 A schematic structural view showing a linear nozzle 1 of a coating machine according to the present invention, figure 2 shows the substrate 2 after finishing the coating process according to the present invention, figure 2 The direction of the arrow in represents the advancing direction of the linear nozzle 1 . exist figure 1 Among them, the linear nozzle 1 is used to coat the photoresist 3 for the substrat...

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Abstract

The invention provides a coating machine. The coating machine is used for coating a substrate with a photoresist and is equipped with a driving motor, a linear nozzle and blocking pieces, wherein the driving motor is used for driving the linear nozzle to move horizontally or vertically, the linear nozzle comprises spouts for spraying the photoresist downwards, and the blocking pieces are arranged at end parts of the spouts and used for stopping the end parts of the spouts from coating the substrate with the photoresist. According to the coating machine, the edge area of the substrate is not required to be coated with the photoresist, so that an edge exposure process of the substrate can be omitted, the equipment cost of an edge exposure machine can be saved, and the risk of inferior-quality products is reduced.

Description

technical field [0001] The invention relates to the field of mechanical processing, in particular to a coating machine. Background technique [0002] In the production process of the existing TFT-LCD (Thin Film Transistor Liquid Crystal Display, Thin Film Transistor Liquid Crystal Display) products, the exposure process is a necessary process. [0003] In the current exposure process process, it is first necessary to coat a photoresist on a substrate, and then perform exposure and development on the photoresist after the coating is completed. However, after exposure, it is necessary to perform exposure treatment on the edge area of ​​the non-pattern area and then perform development treatment. Therefore, when investing in equipment during the factory construction stage, it is necessary to increase the equipment cost of purchasing the edge exposure machine, occupy the space of the clean room, and increase the construction cost of the clean room. And it is also necessary to ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G03F7/16
Inventor 张余堂
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD