A three-degree-of-freedom piezoelectric-driven precision positioning platform with large displacement and high frequency response

Abstract

Disclosed is a large-displacement high-frequency-response three-degree-of-freedom piezoelectric driving precise locating platform. The locating platform comprises a rigid base. The two sides of the rigid base are connected with one first rigid output end of a rhombus displacement amplifying mechanism. The other first rigid output end of the rhombus displacement amplifying mechanism is connected with one second rigid input end of a bridge-shaped displacement amplifying mechanism. Piezoelectric ceramics are connected to two first rigid input ends of the rhombus displacement amplifying mechanism. The rhombus displacement amplifying mechanism forms a flexible mechanism based on the triangulation principle through connection of a flexible arm, the two first rigid input ends and the two first rigid output ends. The bridge-shaped displacement amplifying mechanism is an arch-bridge-shaped flexible mechanism composed of two flexible beams, two second rigid input ends and a first second rigid output end. The two symmetrical flexible beams form bevel edges of the bridge-shaped displacement amplifying mechanism. Through the locating platform, large-stroke high-bandwidth high-precision displacement output can be achieved, and the structure is simple and compact.

Description

technical field [0001] The invention belongs to the technical field of precision positioning platforms, and in particular relates to a three-degree-of-freedom piezoelectric-driven precision positioning platform with large displacement and high frequency response. Background technique [0002] At present, there are mainly three types of known precision positioning platforms. The first type is a mechanical transmission positioning platform, such as a screw mechanism, a lever mechanism, a wedge cam mechanism, etc., and their combination mechanisms. The biggest advantage of the mechanical transmission positioning platform is its large stroke and high output rigidity, but there are shortcomings such as mechanical clearance and friction and wear, and it is difficult to greatly improve the movement sensitivity and positioning accuracy of the mechanism; the second type is to achieve precision by using linear motors or ultrasonic motors. Positioning, the positioning accuracy has been...

AI Technical Summary

Problems solved by technology

At present, the degrees of freedom of the known precision positioning platforms are mostly two degrees of freedom, and the displacement output of more than two degrees of freedom can also be realized through complex mechanism design, but the output displacement, output stiffness and natural frequency of the platform are always mutually constrained. Achieving large displacement output must be at the cost of loss of natural frequency

Images