A high-precision, large-travel, three-degree-of-freedom parallel micro-positioning platform

A technology of micro-positioning platform and large stroke, which is applied in the direction of instruments and instrument parts, etc., can solve the problem of lowering the natural frequency of the working bandwidth of the platform, and achieve the effects of avoiding pressure instability, increasing bandwidth, and improving motion accuracy

Inactive Publication Date: 2019-08-02
TIANJIN UNIV
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

However, this series mechanism will lead to a reduction in the operating bandwidth and natural frequency of the platform

Method used

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  • A high-precision, large-travel, three-degree-of-freedom parallel micro-positioning platform
  • A high-precision, large-travel, three-degree-of-freedom parallel micro-positioning platform

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Embodiment Construction

[0011] In order to further understand the invention content, characteristics and effects of the present invention, the following examples are given, and detailed descriptions are as follows in conjunction with the accompanying drawings:

[0012] see Figure 1 ~ Figure 2 , a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform, including a base body 1, a moving platform 8 formed in the center of the base body 1, and four flexible bridge-type amplification mechanisms uniformly distributed around the moving platform 8 3. Two of the flexible bridge amplifying mechanisms 3 are arranged along the X direction, and the other two flexible bridge amplifying mechanisms 3 are arranged along the Y direction, and each of the flexible bridge amplifying mechanisms 3 is provided with a parallel plate guiding mechanism 4. The combination of the two forms a micro-positioning mechanism. Any one of the flexible bridge amplifying mechanisms 3 arranged along the X...

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Abstract

The invention discloses a high-accuracy, large-stroke three-degree of freedom parallel micro positioning platform. The platform comprises a base body; a movable platform is formed at the center of the base body; four flexible bridge amplifying mechanisms are evenly arranged around the movable platform; any flexible bridge amplifying mechanism arranged along an X direction is driven by a piezoelectric ceramic driver I; two flexible bridge amplifying mechanisms arranged along a Y direction are respectively driven by one piezoelectric ceramic driver II; two flexible bridge amplifying mechanisms arranged along the X direction are connected with the movable platform through two semicircular flexible hinges I which are connected in series in the X direction respectively; and the two flexible bridge amplifying mechanisms arranged along the Y direction are connected with the movable platform through one group of semicircular flexible hinges II respectively, wherein each group of semicircular flexible hinges I includes two semicircular flexible hinges II which are connected in series and are parallel to the Y direction; and the two groups of semicircular flexible hinges II are in central symmetry. The high-accuracy, large-stroke three-degree of freedom parallel micro positioning platform of the invention can realize high-accuracy and large-stroke movement in an XY plane, has high working bandwidth and natural frequency.

Description

technical field [0001] The invention relates to a three-degree-of-freedom parallel micro-positioning platform, in particular to a high-precision, large-stroke three-degree-of-freedom parallel micro-positioning platform. Background technique [0002] With the development of science and technology, micro-nano technology has been widely used. However, the high-precision micro-positioning platform has always restricted the promotion of micro-nano technology. At present, the micro-positioning platform with small stroke has achieved a major breakthrough, but the micro-positioning platform with high precision and large stroke needs to be further improved. At present, the most commonly used structure of high-precision, long-stroke micro-positioning platform is: X-direction translation, Y-direction translation and Z-direction rotation in series. However, this cascading mechanism will lead to a reduction in the operating bandwidth and natural frequency of the platform. Contents of...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G12B5/00
CPCG12B5/00
Inventor 周重凯田延岭郭志永张大卫
Owner TIANJIN UNIV
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