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Parallel light ratio imaging-based long distance micro-object overlapping ratio detection method

A detection method and a long-distance technology, which is applied in the direction of measuring devices, optical devices, instruments, etc., can solve the problems of remote measurement of the spatial position of tiny objects, and achieve improved detection accuracy, improved measurement accuracy, and a wide range of applications Effect

Inactive Publication Date: 2017-01-11
ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0004] The purpose of the present invention is to provide a long-distance micro-object coincidence detection method based on parallel light ratio imaging, which has the characteristics of long measurement distance and high observation resolution, and can perform high-precision coincidence measurement on micro-scale objects, realizing Precise control of the relative spatial geometric positional relationship of multiple tiny objects to solve the problem that the existing technology cannot measure the spatial position of tiny objects remotely

Method used

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  • Parallel light ratio imaging-based long distance micro-object overlapping ratio detection method
  • Parallel light ratio imaging-based long distance micro-object overlapping ratio detection method

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Effect test

Embodiment 1

[0042] When the geometric size ratio of the first micro-object 3 and the second micro-object 6 is 1:1:

[0043] Build the first optical imaging system 4 and the second optical imaging system 5, and make their focal lengths equal, namely f 1 = f 2 = f, then adjust the optical system 4, 5 to the coaxial; place the white light source 1 at the head end of the coaxial axis, place the uniform plate 2 on the rear side of the white light source, and homogenize the light beam from the white light source 1 through the uniform plate 2. Homogenous white light is irradiated on the first micro object 3, the first micro object 3 is placed at the focal point of the imaging system 4, and the imaging system 4 is placed between the first micro object 3 and the second micro object 6 The second optical imaging system 5 is reversely placed on the coaxial rear end of the first optical imaging system 4, so that the image of the first micro-object 3 and the body are at the focal point of the optical ...

Embodiment 2

[0045] When the geometric size ratio of the first micro-object 3 and the second micro-object 6 is 1:2:

[0046] Build the first optical imaging system 4 and the second optical imaging system 5, so that the focal length ratio is inversely proportional to the geometric size ratio of the first micro-object 3 and the second micro-object 6, namely f 1 :f 2 =2:1, and adjust the optical system 4 and 5 to be coaxial; place the white light source 1 at the head end of the coaxial axis, place the dodging plate 2 at the rear side of the white light source, and evenly distribute the light beam from the white light source 1 through the dodging plate 2 Turn into homogeneous white light and irradiate on the first micro object 3, place the first micro object 3 at the focal point of the imaging system 4, and the imaging system 4 is placed between the first micro object 3 and the second micro object 6 position; the second optical imaging system 5 is reversely placed on the coaxial rear end of t...

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Abstract

The invention discloses a parallel light ratio imaging-based long distance micro-object overlapping ratio detection method comprising the following steps: a first optical imaging system and a second optical imaging system are built; a white light source is switch on, a light beam coming from the white light source is radiated on a first micro-object via a uniform light plate, the first micro-object is placed at a focal point of the first optical imaging system, the second optical imaging system is reversely placed on a rear end of the first optical imaging system, a second micro-object is placed at a focal point of the second optical imaging system, an observation device is placed behind the second micro-object, the second micro-object is placed at a focal point of the observation device, a focal length of the observation device is subjected to fine tuning operation, zoomed object images of the second micro-object and the first micro-object can be clearly displayed on the observation device, the object images of the second micro-object and the first micro-object are compared with each other in terms of overlapping precision, and a measurement result can be obtained. Via the parallel light ratio imaging-based long distance micro-object overlapping ratio detection method provided in the invention, a problem that overlapping ratios of micro-objects cannot be measured in a large space can be solved.

Description

technical field [0001] The invention relates to the technical field of geometric quantity measurement and measurement, in particular to a method for detecting coincidence degree of remote micro objects based on parallel light ratio imaging. Background technique [0002] At present, compared with other measurement methods, optical precision measurement technology has the characteristics of high precision, high efficiency and no damage, and is widely used in various industries. For example, the long-distance spatial positioning measurement of large objects can be easily realized by optical measurement methods. [0003] However, the long-distance measurement of the spatial position of tiny objects with similar geometric dimensions and wavelengths is limited by photophysical characteristics, equipment accuracy, etc., and often cannot meet the required accuracy or even measure; on the other hand, general optical measurement uses laser beams As a measurement light source, due to ...

Claims

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Application Information

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IPC IPC(8): G01B11/00
CPCG01B11/00
Inventor 何建国韩炜麻云凤余锦貊泽强林蔚然刘昊陈艳中李昊凡炼文
Owner ACAD OF OPTO ELECTRONICS CHINESE ACAD OF SCI
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