A mask integrated frame and evaporation device

Abstract

Embodiments of the present invention provide a mask integrated frame and an evaporation device, which relate to the technical field of evaporation. It can solve the problem that evaporation materials are easy to accumulate in the gap between the fine metal mask and the substrate to be evaporated on the mask integrated frame. It includes a hollow frame provided with a hollow area, a fine metal mask including a mask pattern area and an ineffective mask area, and a first support bar. The fine metal mask and the first support bar are arranged along the first direction and the second direction respectively. The direction spans the hollow area of ​​the hollow frame, and the first support bar is used to support the fine metal mask. Wherein, the first direction and the second direction intersect each other, the fine metal mask and the first support bar intersect in the ineffective mask area of ​​the fine metal mask, the first support bar is provided with a groove, and the fine metal mask The ineffective mask area where the mask plate intersects with the first support bar is located in the groove, and the depth of the groove is greater than or equal to the thickness of the fine metal mask plate.

Description

technical field [0001] The invention relates to the field of evaporation technology, in particular to a mask integration frame and an evaporation device. Background technique [0002] The OLED (Organic Light Emitting Diode, Organic Light Emitting Diode) display panel has many advantages such as self-illumination, fast response, high brightness, thinness, etc., and has gradually become the mainstream in the display field. [0003] The OLED display panel includes a plurality of sub-pixel units arranged in an array, and each sub-pixel unit includes an anode, a light-emitting layer, and a cathode. The light-emitting layer is formed of organic electroluminescent materials. Currently, a mask plate is mainly used to make it through an evaporation process. in each sub-pixel unit. There is a composition pattern on the mask. As the screen PPI (Pixels Per Inch, the number of pixels per inch) increases, the composition pattern area on the mask is further refined, forming a fine metal m...

AI Technical Summary

Problems solved by technology

[0008] Embodiments of the present invention provide a mask integration frame and an evaporation device, which can solve the problem of evaporation caused by the gap between the fine metal mask plate on the mask integration frame and the substrate to be evaporated placed on the mask integration frame. Problems where material tends to accumulate in gaps

Images