Two-dimensional high-frequency micro-amplitude vibrator based on flexible parallel mechanism

Abstract

The invention discloses a two-dimensional high-frequency micro-amplitude vibrator based on a flexible parallel mechanism. The vibrator comprises four symmetrically arranged micro-vibration branch chains and a micro-vibration platform, wherein each of the micro-vibration branch chains is composed of four pairs of perfect circular flexible hinge combinations, a pair of straight beam flexible hinge combinations, a pair of straight beam structures and two groups of rod members, and micro-amplitude vibration in a single direction can be generated; the micro-vibration platform is composed of two pairs of beam plate structures and vibrators and can transfer micro-amplitude vibration in two vertical directions. The four micro-vibration branch chains are symmetrically arranged in the form of a cross, and each of the micro-vibration branch chains generates the micro-amplitude vibration in one direction. The micro-amplitude vibration in the single direction is generated by five pairs of flexible hinges, one pair of straight beam structures and two groups of rod members. Vibration generated by the micro-vibration branch chains is transferred by using the beam plate structures. A guiding function to vibration in one direction is realized by using one pair of beam plate structures. The designed micro-vibrator can be used in the fields of ultra-precision machining, bioengineering, nano science and technology and the like.

Description

technical field [0001] The invention belongs to the field of ultra-precision machining, and in particular relates to a high-frequency micro-amplitude ultra-precision vibrator designed by using a flexible mechanism. The designed micro-vibrator can be used in the fields of ultra-precision machining, bioengineering, nano science and technology, and the like. Background technique [0002] Micro-vibrator can produce vibrations with amplitudes of micron or even nano-scale, and micro-vibrator has broad application prospects in precision micromachining, microelectronic engineering, bioengineering, nanoscience and technology, etc. In the field of micromachining, it is necessary to use a micro-amplitude vibrator to realize micro-milling, grinding, grinding and other processes. In the field of micro-nano mechanical performance testing, micro-nano indentation test technology refers to the use of an indenter with a specific tip to press in and out the surface of the test piece according ...

AI Technical Summary

Problems solved by technology

[0003] The currently designed micro-vibrator is realized by traditional mechanism, but the traditional mechanism has gaps and friction between kinematic pairs, and cannot realize precise high-frequency micro-vibration

Moreover, the currently designed micro-vibrators can only achieve single-degree-of-freedom vibrations, but in the process of micro-machining operations, multi-dimensional composite micro-vibrations with complex motion trajectories need to be realized, and multi-degree-of-freedom micro-vibrators are required.

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