Identification control method and device of semiconductor technical segment

A control method and technology of the process section, applied in the direction of manufacturing computing systems, instruments, data processing applications, etc., can solve problems such as scrap, product yield reduction, product processing errors, etc.
CN106529753AInactive Publication Date: 2017-03-22PEKING UNIV FOUNDER GRP CO LTD +1
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Patent Information

Authority / Receiving Office
CN · China
Current Assignee / Owner
PEKING UNIV FOUNDER GRP CO LTD
Publication Date
2017-03-22
Estimated Expiration
Not applicable · inactive patent

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Abstract

The invention discloses an identification control method and device of a semiconductor technical segment. The method comprises that description information of a workpiece to be dispatched is obtained, and the description information comprises a Recipe_ID of the workpiece to be dispatched; correspondence between preset Recipe_IDs and a machine Recipe is obtained, a machine included by the machine Recipe corresponding to the Recipe_ID of the workpiece to be dispatched is determined according to the Recipe_ID of the workpiece to be dispatched, and the machine Recipe includes a technical attribute of a technical segment corresponding to the workpiece to be dispatched; and the workpiece to be dispatched is dispatched to the machine, and the machine is controlled to process the workpiece to be dispatched according to the technical attribute of the technical segment corresponding to Recipe_ID of the workpiece to be dispatched. Thus, the machine is prevented from identification mistakes of the technical segments during processing, processing errors of the machine are avoided, and the processing efficiency of the machine and the yield of products are improved.
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Description

technical field

[0001] The invention relates to the technical field of semiconductor manufacturing, in particular to a semiconductor process section identification control method and device. Background technique

[0002] At present, in the semiconductor manufacturing industry, semiconductor manufacturing factories have to produce a wide variety of semiconductor devices in different quantities at the same time, and the processing techniques of various types of semiconductors are different, and the processing time periods and processing quantities are also different.

[0003] With the continuous increase of output, one machine may allow the production of many different types of products, and each step of each product corresponds to a specific process menu, that is, a machine corresponding to specific production conditions such as temperature and humidity. This requires the machine to switch back and forth between different states. It is possible that the machine is in the stat...

Claims

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