MEMS gyro automatic modal matching control device and method based on negative stiffness effect

Abstract

The invention provides an MEMS gyro automatic modal matching control device based on a negative stiffness effect, and adopts external calibrating signal input, so as to obtain a required modal matching control quantity. The external calibration signal is formed by superposition of two groups of sinusoidal signals a and b with different frequencies, the frequency of one group is higher than the center frequency of a driving mode, the frequency of the other group is lower than the center frequency of the driving mode, frequency difference between the frequencies of the two groups and the center frequency of the driving mode is equal, thus automatic modal matching is realized, and no extra reference quantity is needed. The device suppresses signal coupling and interference in a modal matching process. Two paths of calibrating signals having the same frequency difference with a driving signal are used, a reference signal of a PI controller is set to be 0, and open-loop search for a reference point is not needed. In the device, the calibrating signals are loaded on a detection mechanism in the form of force feedback, the detection mechanism is put in a feedback loop, detection of the amplitude-frequency characteristic of a mode is brought into full play, and output amplitude of the calibrating signal passing the detection mechanism is relatively large.

Description

technical field [0001] The invention relates to micro-electromechanical systems (MEMS) and micro-inertial device measurement technology, in particular to a MEMS gyroscope automatic mode matching control device based on negative stiffness effect Background technique [0002] MEMS gyroscopes have made great progress in the course of more than 20 years of research, and now they can basically meet the needs of military, industrial and consumer applications such as navigation, guidance and control in the middle and low end. With the advancement and deepening of the research on MEMS gyroscopes, whether MEMS gyroscopes can break through the current accuracy has become the focus of widespread concern in the academic and industrial circles. Therefore, how to further improve the accuracy of MEMS gyroscopes, tap the potential capabilities of MEMS gyroscopes, and even break through its limit accuracy has become a hot issue in the research of MEMS gyroscopes in recent years. Mode matchi...

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Problems solved by technology

There are many defects in early research, such as the need for manual intervention, it is difficult to meet the large-scale production, and it is also diffic

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