50results about How to "Increased mechanical sensitivity" patented technology

The invention provides an MEMS gyro automatic modal matching control device based on a negative stiffness effect, and adopts external calibrating signal input, so as to obtain a required modal matching control quantity. The external calibration signal is formed by superposition of two groups of sinusoidal signals a and b with different frequencies, the frequency of one group is higher than the center frequency of a driving mode, the frequency of the other group is lower than the center frequency of the driving mode, frequency difference between the frequencies of the two groups and the center frequency of the driving mode is equal, thus automatic modal matching is realized, and no extra reference quantity is needed. The device suppresses signal coupling and interference in a modal matching process. Two paths of calibrating signals having the same frequency difference with a driving signal are used, a reference signal of a PI controller is set to be 0, and open-loop search for a reference point is not needed. In the device, the calibrating signals are loaded on a detection mechanism in the form of force feedback, the detection mechanism is put in a feedback loop, detection of the amplitude-frequency characteristic of a mode is brought into full play, and output amplitude of the calibrating signal passing the detection mechanism is relatively large.

A three-layer self-healing flexible strain sensor includes: a self-healing sensitive layer, wherein a self-healing encapsulating layer is respectively placed on an upper surface and a lower surface of the self-healing sensitive layer. The self-healing sensitive layer comprises a doped carbon material or a conductive composite. The three self-healing layers of the self-healing strain sensor can quickly repair the internal and external damage caused by the layered structure in a short period of time after the external damage, and does not require external stimulation. The three-layer self-healing structure strain sensor is simple in preparation without using a repair agent, which can achieve rapid self-repair at the room temperature, and can be repeatedly repair. The three-layer self-healing structure increases the strength and modulus of the strain sensor as well as increases the ability of the strain sensor to resist external damage.

The invention relates to a micromechanical gyroscope, in particular to a micromechanical gyroscope bandwidth expanding method based on a dipole compensation method. The method solves the problem that when the micromechanical gyroscope is used, consideration can not be given to the mechanical sensitivity and the bandwidth. The micromechanical gyroscope bandwidth expanding method based on the dipole compensation method comprises the following implementation steps that 1, resonance angular frequency of a drive mode and a detection mode of the micromechanical gyroscope is determined in a frequency scanning mode; 2, according to the result of a frequency scanning test of the drive mode and the detection mode of the micromechanical gyroscope, quality factors of the drive mode and the detection mode of the micromechanical gyroscope are calculated; 3, a dipole compensating controller is additionally arranged in a detection loop of the micromechanical gyroscope; the dipole compensating controller comprises a zero pole generating link and a proportional link. The method is suitable for the micromechanical gyroscope.

A fiber optic F-P sound pressure sensor based on metal film belongs to the technical field of the sound pressure sensor. The sound pressure sensor comprises a metal corrugated film, a cavity casing, a ferrule and an optical fiber. The metal corrugated film is used as a sound pressure sensitive element, and is bonded with one end face of the cavity sleeve with a cured adhesive, and a ferrule with the inner wall of the cavity casing is inserted from the other end face of the cavity sleeve, and the center of the ferrule is inserted with an end-polished fiber. The cavity sleeve, the ferrule and the fiber set co-axially, and a cure adhesive is used to fix the cavity sleeve and the ferrule, and the cure adhesive is also used to fix the ferrule and the fiber. The fiber optic F-P sound pressure sensor based on metal film is capable of solving the technical problems caused by the diaphragm material or the diaphragm shape.

The invention provides an MEMS diaphragm and an MEMS sensor chip. The MEMS diaphragm comprises a sensing part and a peripheral part surrounding the periphery of the sensing part. A plurality of outergrooves and a plurality of inner grooves are formed between the peripheral part and the sensing part; the plurality of outer grooves are annularly distributed at the inner edge of the peripheral part;a first connecting arm is formed between every two adjacent outer grooves, the multiple inner grooves are annularly distributed in the outer edge of the sensing part, a second connecting arm is formed between every two adjacent inner grooves, and at least one of the first connecting arms and the second connecting arms is provided with a reinforcing rib structure.

The invention discloses a comb tooth capacitive micro-electromechanical accelerometer structure. The structure comprises comb tooth groups, a mass block, flexible beams, flexible beam support rods andcomb tooth support rods, wherein the mass block is a frame structure shaped like a Chinese character Ri; the comb tooth groups are variable-gap comb tooth groups; each comb tooth for forming the combtooth groups is a pentagonal comb tooth with a gradually varied comb tooth width at the overlapped area; the comb tooth groups are crossly distributed in the inner and outer sides of the mass block frame to form a differential capacitor; the movable comb teeth of the comb tooth groups are connected with the mass block and are suspended at two ends of the flexible beam support rods on the two outermost sides of the structure through four flexible beams at four corners of the mass block frame; and the fixed comb teeth of the comb tooth groups are connected with the comb tooth support rods. Thepentagonal comb teeth is capable of increasing the tooth pair number while keeping the tooth clearance ratio, so that benefit is brought to improve the sensitivity of the accelerometer. The crossly distributed comb tooth groups are capable of making up the capacitive differences caused by nonuniform etching process so as to improve the capacitive symmetry, and is also capable of compensating the influences, on the differential capacitor, caused by environment temperature change so as to improve the stability of a calibration factor of the accelerometer.

A MEMS microphone includes a substrate (100), a supporting part (200), an upper polar plate (300) and a lower polar plate (400). The substrate (100) is provided with an opening (120) penetrating the middle thereof; the lower polar plate (400) straddles the opening (120); the supporting part (200) is fixed on the lower polar plate (400); the upper polar plate (300) is affixed to the supporting part (200); an accommodating cavity (500) is formed among the supporting part (200), the upper polar plate (300) and the lower polar plate (400); a recess (600) opposite to the accommodating cavity (500) is arranged in an intermediate region of at least one of the upper polar plate (300) and the lower polar plate (400), and insulation is achieved between the upper polar plate (300) and a lower polar plate (400).

The invention provides a silicon micromachined resonant accelerometer. One end of each force arm of a micro-mechanical lever mechanism, which is far away from a corresponding anchoring body, is fixedon a mass block; the moving components of resonators are connected with the force arms and are driven to move by the force arms; the resonators are symmetrically arranged with respect to the middle line of the mass block; the displacement directions of the moving components of the two resonators which are symmetrical to each other after the moving components bear forces are opposite to each other;the resonators are symmetrically arranged with respect to the center line of the mass block, so that the resonant frequencies of the operating modes of the two resonators are equal; the two resonators are distributed at two ends of the mass block, so that the mutual interference of resonant structures can be greatly reduced, and the noise level of the accelerometer can be decreased; since the resonators are located at the two ends of the mass block, the asymmetric vibration of the resonant structures which is caused by the asymmetry of the machining of the mass block can be greatly reduced; and therefore, drift caused by process error, temperature change and environmental vibration can be greatly reduced, and the interference of environmental factors can be effectively suppressed from thestructure of the accelerometer, and the sensitivity of the accelerometer can be effectively improved.

The invention discloses a harmonic oscillator structure of a laser gyroscope. The harmonic oscillator structure comprises a center body, a resonant ring, spokes, vibration transmission beams and vibration transmission sheets, wherein a center hole is formed in the center of the center body; the resonant ring sleeves the center body; the outer wall of the center body is connected with the inner wall of the resonant ring through a plurality of the spokes; the spokes are annularly and symmetrically distributed around the center hole; a piezoelectric element is bonded to at least one side of eachof the spokes; the center body is further connected with the vibration transmission sheets through the vibration transmission beams; and the outer walls of the vibration transmission sheets are matched with the inner walls of containing holes formed in an optical cavity of the laser gyroscope. The harmonic oscillator structure has the remarkable effects that the structure is simple, the manufacturing is simple, the mechanical sensitivity is higher than that of a traditional structure, the lock area of the optical laser gyroscope is well reduced or even eliminated, and the performance and the precision of a laser gyroscope product are effectively improved.

The invention provides an MEMS diaphragm and an MEMS sensor chip. The MEMS diaphragm comprises a sensing part and a peripheral part surrounding the periphery of the sensing part. A plurality of outergrooves and a plurality of inner grooves are formed between the peripheral part and the sensing part; the outer grooves are annularly distributed in the inner edge of the peripheral part, the tail ends of the outer grooves extend towards the inner side, the inner grooves are annularly distributed in the outer edge of the sensing part, the tail ends of the inner grooves extend towards the inner side, and the portion, corresponding to the tail ends of every two adjacent outer grooves, of each inner groove is sunken inwards to form an inwards-concave section.

The invention discloses an out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity, and belongs to the field of MEMS inertial devices. The accelerometer comprises astructural layer, a substrate layer and a silicon cover plate; the sensitive structure of the accelerometer comprises four sets of orthogonally distributed sensitive mass units and an unbalanced massblock. and each set of sensitive mass unit is connected with the central mass block through two connecting beams. the center of each detection mass block comprises two anchor points, and each anchor point is connected to the detection mass block through two elastic torsion beams. According to the Z-axis MEMS accelerometer with low cross-axis sensitivity, the sensitive structure with the large massblocks is adopted, common-mode interference is reduced through the multiple differential mass blocks, and low cross-axis sensitivity is achieved through the orthogonally-distributed sensitive mass units.