3results about How to "Increased mechanical sensitivity" patented technology

The invention provides an MEMS gyroscope, the MEMS gyroscope comprises a substrate, a device layer, a driving structure, a driving electrode structure, a detection structure, a detection beam and a detection electrode unit, the device layer is fixed on the substrate and comprises a plurality of structure units which are mutually connected and arranged in an array; the driving structure is located in the structure unit and comprises a mass body, a driving frame, an elastic beam, a first folding beam, a first combination beam, a second combination beam and a third combination beam. The driving electrode structure is located in the structural unit and comprises a first capacitor, a second capacitor and a third capacitor; the detection structure is located in the structural unit and comprises a detection frame and a movable electrode frame; the detection beam is located in the structural unit and connected with the movable electrode frame, and the cross endpoint is connected with the mass body; the plurality of detection electrode units are located in the internal area of the detection frame and comprise a fourth capacitor, a fifth capacitor, a sixth capacitor and a seventh capacitor which are arranged in an array. According to the MEMS gyroscope disclosed by the invention, the mechanical sensitivity is improved.

According to the micro-hemisphere gyroscope sensor, an excitation electrode and a detection electrode are separately arranged, and compared with a traditional electrode design of an integrated structure, the micro-hemisphere gyroscope sensor has the advantage that the effectively utilized capacitance can be remarkably increased under the condition of the same structural size. The design not only optimizes the capacitance performance, but also greatly reduces the signal interference intensity between the excitation electrode and the detection electrode, thereby effectively improving the mechanical sensitivity and the measurement precision of the gyroscope. The innovation not only enhances the performance of the equipment, but also provides a more reliable technical basis for the development of a high-precision navigation and positioning system.

This invention discloses a highly sensitive detection device and method for immersion-type ultrasonic signal detection in liquids. The invention provides a circular diaphragm with concentric corrugations and a center-thinned structure, and uses this diaphragm as a reflective surface of an optical interference cavity to construct a highly sensitive detection device for immersion-type ultrasonic signal detection in liquids. The diaphragm, used to sense ultrasonic signals, has identical concentric corrugations and a center-thinned structure on both sides, enabling the diaphragm to achieve higher mechanical sensitivity without significantly reducing its natural frequency. The concentric corrugations effectively release initial residual stress introduced during processing and packaging, reducing surface warping and baseline drift. Simultaneously, a replaceable acoustic membrane is constructed in front of the diaphragm, achieving high sound transmission and anti-contamination under long-term immersion in liquid conditions. This detection device can be directly placed in the liquid for detection, improving the sensitivity of ultrasonic signal detection while maintaining a wide frequency range, preventing contamination of the detection element, and ensuring the long-term stability of the detection device.