Out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity

Abstract

The invention discloses an out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity, and belongs to the field of MEMS inertial devices. The accelerometer comprises astructural layer, a substrate layer and a silicon cover plate; the sensitive structure of the accelerometer comprises four sets of orthogonally distributed sensitive mass units and an unbalanced massblock. and each set of sensitive mass unit is connected with the central mass block through two connecting beams. the center of each detection mass block comprises two anchor points, and each anchor point is connected to the detection mass block through two elastic torsion beams. According to the Z-axis MEMS accelerometer with low cross-axis sensitivity, the sensitive structure with the large massblocks is adopted, common-mode interference is reduced through the multiple differential mass blocks, and low cross-axis sensitivity is achieved through the orthogonally-distributed sensitive mass units.

Description

technical field [0001] The invention belongs to the field of MEMS inertial devices, in particular to an out-of-plane axial detection MEMS capacitive accelerometer with low cross-axis sensitivity. Background technique [0002] MEMS accelerometer is an inertial sensor manufactured based on MEMS technology, which is used to measure inertial parameters such as carrier inclination angle, inertial force, shock and vibration. MEMS accelerometers have the advantages of small size, low cost, high reliability, and suitable for mass production. They are widely used in various fields such as aerospace, national defense and military, consumer electronics, intelligent medical care, and earthquake monitoring. [0003] With the upsurge of research on unmanned aerial vehicles, unmanned vehicles, and unmanned ships in recent years, various micro-navigation and micro-inertial systems have an urgent need for a three-axis accelerometer that can provide all-round acceleration information. In thi...

AI Technical Summary

Problems solved by technology

The traditional torsional pendulum accelerometer adopts a single torsion mass structure, which has poor ability to suppress common mode interference and errors caused by changes in operating temperature. When the operating temperature changes, the temperature characteristics of the instrument will be affected due to changes in the thermal stress of the material. make an impact

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