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Micromechanical gyroscope bandwidth expanding method based on dipole compensation method

A micromachined gyroscope and compensation method technology, which is applied to gyroscope/steering sensing equipment, gyroscopic effect for speed measurement, instruments and other directions, which can solve the problem that the micromachined gyroscope cannot take into account the mechanical sensitivity and bandwidth, etc.

Inactive Publication Date: 2015-09-23
ZHONGBEI UNIV
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Problems solved by technology

[0040] In order to solve the problem that the micro-mechanical gyroscope cannot take into account both the mechanical sensitivity and the bandwidth, the present invention provides a method for expanding the bandwidth of the micro-mechanical gyroscope based on the dipole compensation method

Method used

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  • Micromechanical gyroscope bandwidth expanding method based on dipole compensation method
  • Micromechanical gyroscope bandwidth expanding method based on dipole compensation method
  • Micromechanical gyroscope bandwidth expanding method based on dipole compensation method

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Embodiment Construction

[0075] A micromachined gyroscope bandwidth expansion method based on the dipole compensation method, which is implemented by the following steps:

[0076] 1) Determine the resonant angular frequency of the driving mode and the detection mode of the micromechanical gyroscope by means of frequency sweep;

[0077] 2) According to the results of the frequency sweep test of the micromechanical gyroscope driving mode and detection mode, the quality factor of the micromechanical gyroscope driving mode and detection mode is calculated, and the specific calculation formula is as follows:

[0078] Q x = ω x ω x + 3 ...

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Abstract

The invention relates to a micromechanical gyroscope, in particular to a micromechanical gyroscope bandwidth expanding method based on a dipole compensation method. The method solves the problem that when the micromechanical gyroscope is used, consideration can not be given to the mechanical sensitivity and the bandwidth. The micromechanical gyroscope bandwidth expanding method based on the dipole compensation method comprises the following implementation steps that 1, resonance angular frequency of a drive mode and a detection mode of the micromechanical gyroscope is determined in a frequency scanning mode; 2, according to the result of a frequency scanning test of the drive mode and the detection mode of the micromechanical gyroscope, quality factors of the drive mode and the detection mode of the micromechanical gyroscope are calculated; 3, a dipole compensating controller is additionally arranged in a detection loop of the micromechanical gyroscope; the dipole compensating controller comprises a zero pole generating link and a proportional link. The method is suitable for the micromechanical gyroscope.

Description

technical field [0001] The invention relates to a micromechanical gyroscope, in particular to a method for expanding the bandwidth of a micromechanical gyroscope based on a dipole compensation method. Background technique [0002] The micromechanical gyroscope is a sensor that uses the Coriolis effect principle to input angular rate information from a sensitive carrier. It has the advantages of small size, low power consumption, light weight, low cost, strong anti-overload characteristics, easy integration and mass production, etc. And it is widely used in many fields (such as inertial navigation, automobile safety, industrial control, consumer electronics, etc.). Such as Figure 1-Figure 2 As shown, the micromechanical gyroscope includes a gyro structure and a gyro measurement and control circuit. The gyro structure includes a driving axial structure and a detecting axial structure. The detection axial structure includes a Coriolis mass and a detection displacement extrac...

Claims

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Application Information

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IPC IPC(8): G01C19/5776
CPCG01C19/5776
Inventor 曹慧亮刘俊石云波申冲秦丽唐军李杰张晓明马宗敏鲍爱达
Owner ZHONGBEI UNIV
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