High-precision temperature control room and temperature control method for ultra-clean space
A high-precision, temperature-controlled room technology, applied in control input involving air characteristics, space heating and ventilation control input, space heating and ventilation, etc., can solve problems such as air supply and exhaust ducts, airflow disturbance, etc. To achieve the effect of simple control process and accurate temperature control
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[0024] The present invention is described in detail below in conjunction with accompanying drawing:
[0025] Such as figure 1 and figure 2 As shown, a high-precision temperature control room in an ultra-clean space includes a small laboratory 2, a core laboratory 9 and a precision processing area 12 arranged at intervals; the first return air is arranged around the small laboratory 2 The corridor 3; the core laboratory 9 adopts a multi-level nested structure, the core laboratory 9 is provided with a core area corridor 8, and the core area corridor 8 is provided with a superfine area corridor 7 on one side, and a second circuit is provided on the other side The air passageway 10; the core laboratory 9 is provided with ventilation panel walls 13 capable of forming natural convection on both sides; the side wall of the precision machining area 12 is provided with a return air passageway 11; the return air duct in the second return air passageway 10 is connected to the Corridor...
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