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High-precision temperature control room and temperature control method for ultra-clean space

A high-precision, temperature-controlled room technology, applied in control input involving air characteristics, space heating and ventilation control input, space heating and ventilation, etc., can solve problems such as air supply and exhaust ducts, airflow disturbance, etc. To achieve the effect of simple control process and accurate temperature control

Active Publication Date: 2019-01-18
CHINA UNITED NORTHWEST INST FOR ENG DESIGN & RES
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

And there should not be any air supply and exhaust ducts in the experimental area, so as not to disturb the air flow

Method used

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  • High-precision temperature control room and temperature control method for ultra-clean space
  • High-precision temperature control room and temperature control method for ultra-clean space
  • High-precision temperature control room and temperature control method for ultra-clean space

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Embodiment Construction

[0024] The present invention is described in detail below in conjunction with accompanying drawing:

[0025] Such as figure 1 and figure 2 As shown, a high-precision temperature control room in an ultra-clean space includes a small laboratory 2, a core laboratory 9 and a precision processing area 12 arranged at intervals; the first return air is arranged around the small laboratory 2 The corridor 3; the core laboratory 9 adopts a multi-level nested structure, the core laboratory 9 is provided with a core area corridor 8, and the core area corridor 8 is provided with a superfine area corridor 7 on one side, and a second circuit is provided on the other side The air passageway 10; the core laboratory 9 is provided with ventilation panel walls 13 capable of forming natural convection on both sides; the side wall of the precision machining area 12 is provided with a return air passageway 11; the return air duct in the second return air passageway 10 is connected to the Corridor...

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Abstract

The invention discloses a high-precision temperature control room and method for an ultra-clean space. The high-precision temperature control room comprises a minitype laboratory, a core laboratory and a precision processing zone which are arranged in a spaced mode. A first return air passageway is arranged on the periphery of the minitype laboratory. The core laboratory adopts a multi-level nested structure. A core zone winding corridor is arranged on the periphery of the core laboratory. An ultra-precise zone corridor is arranged at one side of the core zone winding corridor, and a second return air passageway is arranged at the other side of the core zone winding corridor. The core laboratory is provided with two ventilation plate walls used for natural convection. A return air feeding passageway is formed in the side wall of the precision processing zone. By adoption of the structure, the internal temperature of the control room can be controlled to be + / -0.01 DEG C; and no air blowing and exhausting pipeline is allowed to be arranged in the laboratory zone to avoid air disturbance.

Description

【Technical field】 [0001] The invention belongs to the field of architectural design, and specifically relates to a high-precision temperature control room and a temperature control method for an ultra-clean space. 【Background technique】 [0002] As the production of precision equipment and the application of foreign imported equipment become more and more common, higher requirements are put forward for the use environment. If the ambient temperature fluctuates beyond the use requirements, it will cause the equipment to fail to start normally or produce unsuitable products. In order for the user to benefit from the normal operation of high-precision equipment after spending a lot of money, it is particularly important to ensure the ambient temperature of the equipment. 【Content of invention】 [0003] The content of the present invention aims to solve the high-precision requirements of laboratories, and provides a high-precision temperature control room and temperature cont...

Claims

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Application Information

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IPC IPC(8): E04H1/12E04F17/04E04B2/56F24F11/00
CPCE04B2/56E04F17/04E04H1/1277F24F11/30F24F2110/10
Inventor 倪欣丁峰邢超
Owner CHINA UNITED NORTHWEST INST FOR ENG DESIGN & RES
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