A Surface Acoustic Wave Resonator with Precisely Weighted Metal Lattice of Reflective Grid

A metal lattice, surface acoustic wave technology, applied in impedance networks, electrical components, etc., can solve the problems of large acoustic wave diffraction and small aperture of reflection gratings, and achieve the effects of sidelobe suppression, accurate weighting, and improved frequency response performance.

Active Publication Date: 2020-06-19
广东斐瑞智能技术有限公司
View PDF7 Cites 0 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, the reflective grating is weighted by metal lattice, which will lead to the situation that the aperture of the reflective grating is too small and the sound wave diffraction is too large.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • A Surface Acoustic Wave Resonator with Precisely Weighted Metal Lattice of Reflective Grid
  • A Surface Acoustic Wave Resonator with Precisely Weighted Metal Lattice of Reflective Grid
  • A Surface Acoustic Wave Resonator with Precisely Weighted Metal Lattice of Reflective Grid

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0055] The substrate adopts ST-X quartz. The metal lattice 35 of the reflective grid is weighted in two ways: Hamming function weighting and precise weighting. Specifically, the SAW resonator structure after the reflective grating is weighted by Hamming function lattice weighting and precise weighting is obtained through software simulation to obtain the S11 parameters of the SAW resonator, as shown in Figure 6 shown. With precise weighting, compared with the SAW resonator S11 in which the reflective grid metal lattice 35 is weighted by the Hamming function, the side peaks are reduced from 0.02517 to about 0.0034.

Embodiment approach 2

[0057] The substrate is made of ST quartz; the metal lattice 35 of the reflective grid is weighted by arccosine function weighting and precise weighting. Specifically, the SAW resonator structure is weighted by two methods of arccosine function lattice weighting and precise weighting, and the S11 parameter of the SAW resonator is obtained through software simulation, as shown in Figure 7 shown. Using precise weighting, compared with the parameters of the SAW resonator S11 whose reflective grid metal lattice 35 is weighted by an arccosine function, the side peaks are reduced from 0.0225 to about 0.0125.

Embodiment approach 3

[0059] The substrate is made of ST quartz; the metal lattice 35 of the reflective grid is weighted by Kaiser (beta=3.2) function and precise weighting. Specifically, the SAW resonator structure is weighted by Kaiser function lattice weighting and precise weighting, and the S11 parameters of the SAW resonator are obtained through software simulation, such as Figure 8 shown. Using precise weighting, compared with the SAW resonator S11 parameter weighted by the Kaiser (beta=3.2) function of the reflective grid metal lattice 35, the side peaks are reduced from 0.0184 to about 0.0076.

[0060] Through the comparison of the above three embodiments, it can be seen that on the basis of the metal lattice function lattice on the reflection grid, the precise weighting of the metal points can eliminate the serious sound wave diffraction caused by the small reflection aperture, which affects the reflection accuracy. By optimizing the weighting method, the side lobe is further suppressed,...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention provides a surface acoustic wave (SAW) resonator with accurately weighted reflecting grating array and metal dot arrays. The SAW resonator comprises a piezoelectric substrate, wherein a metal interdigital transducer and a reflecting grating are sputtered on the piezoelectric substrate; the reflecting grating comprises a first short-circuit grating and a second short-circuit grating which are arranged on left and right sides of the metal interdigital transducer respectively; the first short-circuit grating and the second short-circuit grating are symmetrically distributed on the left and right sides of the metal interdigital transducer; a metal dot array weighted by a weighting function is arranged on the first short-circuit grating and the second short-circuit grating; and the distance between metal dots between two adjacent reflecting grids is more than or equal to the minimum distance between the two adjacent reflecting grids in the resonator. The SAW resonator has the beneficial effects that on the basis of arranging the function weighted metal dot arrays on the first short-circuit grating and the second short-circuit grating, the reflection pore diameter is enlarged, so that the problem that the reflection pore diameter is too small so that the diffraction is serious and the reflection precision is influenced is solved; and the weighting of the metal dot arrays is more accurate, the sidelobe suppression is further realized, and the frequency responding performance of the SAW resonator is improved.

Description

technical field [0001] The invention belongs to the technical field of signal and information processing, and in particular relates to a surface acoustic wave resonator with precise weighting of reflective grating metal dot matrix. Background technique [0002] Surface acoustic wave (SAW) resonators are widely used in the field of industrial control due to their good performance, small size, low cost, and easy mass production. [0003] A general SAW resonator is a metal interdigital transducer (Interdigital Transducer, IDT) and a reflection grid processed on the surface of a piezoelectric substrate. Usually a resonator is only concerned with the performance of the main formant. However, since the reflective grating adopts a periodic and unweighted structure, the side peaks are relatively high. [0004] Literature "Analysis of general planar waveguides with N segments," (IEEE Ultrason.Symp., pp.137–141, 2000.) and "Surface Acoustic Wave Device Simulation and Simulation" edi...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
Patent Type & Authority Patents(China)
IPC IPC(8): H03H9/02
CPCH03H9/02645H03H9/02866
Inventor 游瑞煌
Owner 广东斐瑞智能技术有限公司
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap