Circular grating installation error calibration and correction method based on single reading head

An installation error and error correction technology, which is applied in the field of calibration and correction of circular grating installation errors based on a single reading head, can solve problems such as low cost, and achieve the effect of reducing high difficulty requirements and improving error correction accuracy.

Inactive Publication Date: 2017-06-20
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] The invention aims to solve the technical problem that the traditional precision angle measurement cannot achieve low cost, high precision, high reliability, and high temperature adaptability at the same time, and provides a circular grating installation error calibration and correction method based on a single reading head

Method used

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  • Circular grating installation error calibration and correction method based on single reading head
  • Circular grating installation error calibration and correction method based on single reading head
  • Circular grating installation error calibration and correction method based on single reading head

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specific Embodiment approach

[0025] combine figure 1 with 2 Illustrate the embodiment of the present invention, the hardware is made of dial indicator, 24 metal polyhedrons and high-precision autocollimator (accuracy 1 "), computer. On the software, the acquisition software, calibration software and data correction processing software run on the computer Composition. The specific implementation method is as follows:

[0026] Step 1. During the installation of the circular grating by the installer, use a dial indicator to measure the eccentricity, radial runout and end runout of the circular grating; check whether the eccentricity, radial runout and end runout are within 10 μm, and if they are within 10 μm, proceed to step 2 Install the metal polyhedron; if it is not within 10 μm, adjust the circular grating until the eccentricity, radial jump and end jump are within 10 μm;

[0027] Step 2. Use tooling to install the metal polyhedron on the rotating part to ensure that the metal polyhedron moves synchron...

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Abstract

The invention relates to a circular grating installation error calibration and correction method based on a single reading head, relating to the precision machinery field and solving the problems that the conventional precision angle measurement cannot achieve low cost, high precision, high reliability, and high temperature adaptability. The method includes that a dial gauge is used to guarantee the circular grating installation displacement error is within 10[mu]m, a metal polyhedron and a high-precision autocollimator are adopted to carry out the multi-area calibration on the circumference angle measurement error caused by the displacement error, and the angle measurement error is corrected in real time by means of least squares polynomial curve fitting in the area. The error caused by the displacement can be directly converted to the circumference angle measurement error through the space coordinate transformation method, the error correction parameters can be fitted by means of a multi-area precision calibration method, the real-time correction can be carried out during the measurement, therefore, the installation requirement of circular gratings can be reduced, and the ideal angle measurement precision can be realized by the single reading head.

Description

technical field [0001] The invention relates to the field of precision machinery, in particular to a circular grating installation error calibration and correction method based on a single reading head. Background technique [0002] Angle measurement is widely used in various fields, especially in the field of precision machinery. Traditional precision angle measurement generally uses encoders, resolvers and circular gratings. Among them, the encoder angle measurement accuracy is high, but because the disc is made of glass, the environmental adaptability is poor, and it is fragile when the vibration is severe; the resolver has good environmental adaptability, but the angle measurement accuracy is low; and the circular grating is a metal component. , good environmental adaptability, and high measurement accuracy, but the installation method determines that the installation eccentricity, radial jump and end jump have a greater impact on its measurement accuracy. The requirem...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 杨帅王东鹤唐伯浩张涛
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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