Liquid material vaporization device
A technology of liquid material and gasification device, which is applied in the direction of boiling device, gaseous chemical plating, metal material coating process, etc., and can solve the problems of difficult to generate material gas stably and stable gasification
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[0033] One embodiment of the liquid material vaporization device of the present invention will be described below with reference to the drawings.
[0034] The liquid material vaporization device 100 of this embodiment is, for example, assembled in an optical fiber manufacturing device and used in an optical fiber manufacturing process. In addition, for example, it can be incorporated into a semiconductor manufacturing device and used in a semiconductor manufacturing process.
[0035] Specifically, as figure 1 As shown, the liquid material vaporization device 100 includes: a gas-liquid mixing part 2, which mixes the liquid material and a carrier gas as a gas to form a gas-liquid mixture; and a gasification part 3, which heats the gas-liquid mixture and utilizes The carrier gas guides out the material gas obtained by vaporizing the liquid material.
[0036] In addition, the liquid material is OMCTS (octamethylcyclotetrasiloxane, boiling point 175° C.), TEOS (tetraethoxysilane,...
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