The invention discloses a thin-layer
fluid type low-stress
polishing device and belongs to the field of ultra-precise
optical surface machining. The device comprises a sealed working chamber, a rotary table, an
anode plate, an
anode probe, a
cathode platform, a workpiece, a first duct, a
booster pump, a lifting platform, a second duct, a moulding
nozzle, a liquid collection device and the like. During working, the workpiece is fixed on the rotary table, an
electric field is produced between the
anode plate or the anode probe and the
cathode platform, an electrorheological
polishing liquid is mixed uniformly, then is boosted by the
booster pump and flows into the liquid collection device through the first duct and the second duct, under the action of pressure, the liquid flows into a thin-layer area through the moulding
nozzle, and under the action of the flowing power and the shearing force, surface material removing is achieved. According to the thin-layer
fluid type low-stress
polishing device, the problem that the workpiece is broken easily by a thin optical component due to the large
positive pressure is solved, meanwhile, the phenomena that medium-and-
high frequency errors remain easily due to small tool
machining are improved, and the device plays an important role in optical component
machining which is high in precision, free of subsurface damage and controllable in medium-and-
high frequency.