Thin-layer fluid type low-stress polishing device

Abstract

The invention discloses a thin-layer fluid type low-stress polishing device and belongs to the field of ultra-precise optical surface machining. The device comprises a sealed working chamber, a rotary table, an anode plate, an anode probe, a cathode platform, a workpiece, a first duct, a booster pump, a lifting platform, a second duct, a moulding nozzle, a liquid collection device and the like. During working, the workpiece is fixed on the rotary table, an electric field is produced between the anode plate or the anode probe and the cathode platform, an electrorheological polishing liquid is mixed uniformly, then is boosted by the booster pump and flows into the liquid collection device through the first duct and the second duct, under the action of pressure, the liquid flows into a thin-layer area through the moulding nozzle, and under the action of the flowing power and the shearing force, surface material removing is achieved. According to the thin-layer fluid type low-stress polishing device, the problem that the workpiece is broken easily by a thin optical component due to the large positive pressure is solved, meanwhile, the phenomena that medium-and-high frequency errors remain easily due to small tool machining are improved, and the device plays an important role in optical component machining which is high in precision, free of subsurface damage and controllable in medium-and-high frequency.

Description

technical field [0001] The invention relates to a thin-layer fluid type low-stress polishing device, in particular to an electrorheological polishing fluid flow polishing device for thin optical elements, belonging to the field of ultra-precision optical processing. Background technique [0002] With the development of science and technology, modern optical systems have higher and higher requirements for the surface precision of optical components. In addition to the conventional PV, RMS and other indicators, it is also manifested in ultra-smooth, no sub-surface damage, full-band (wavefront within the effective aperture) Various spatial frequency components) error suppression, lightweight and thin, etc. The high-precision optical components required by the laser inertial confinement nuclear fusion device have strict requirements on the errors of the high, medium and low frequency bands on the surface. Generally, the Power Spectral Density function (PSD) index proposed by the...

AI Technical Summary

Problems solved by technology

As a result, the magnetic jet polishing technology (Magnetorheological Jet Polishing, MJP), which uses a local axial magnetic field at the nozzle to stabilize the jet beam and eliminate the initial disturbance, has the advantages of good jet beam consistency, stable removal function, and high polishing accuracy. Electrorheological technology, abrasive water jet technology, etc. belong to the category of small tool polishing. During the polishing process, they can adapt to changes in the curvature of the workpiece surface, but they also have the disadvantages of relatively small material removal rate, relatively low processing efficiency, and easy to produce medium and high frequency errors.

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