Meter-stage large-opening-diameter optical element CO2 laser polishing device and polishing method

Abstract

The invention relates to a meter-stage large-opening-diameter optical element CO2 laser polishing device. On the basis that an optical element does constant-speed motion on a worktable, laser penetrates through a hole in a support, through a reflecting mirror, a light beam is transmitted to a vibrating mirror system composed of a vibrating mirror and a focusing mirror, machining of the optical element is systematically achieved, the reflecting mirror, the vibrating mirror and the focusing mirror which are integrated are mounted on the support and do linear motion in the direction where the laser is incident from the hole, light path transmission cannot be affected by motion of the vibrating mirror system, motion track rough positioning formed by worktable motion and vibrating mirror systemmotion can be achieved well, the self motion of the vibrating mirror system achieves precise positioning of the motion track, according to the device, through the manner of spiral track machining andchanging of parameters, the optical element is scanned, through a fusion and gasifying combined manner, the surface of the optical element is polished, and the device can achieve linear or circumference motion of the meter stage or above.

Description

technical field [0001] The invention relates to the technical field of surface precision and ultra-precision processing of optical elements, in particular to meter-level large-diameter optical elements CO 2 Laser polishing device and polishing method. Background technique [0002] With the development of space optics, aerospace and other science and technology, higher and higher requirements are put forward for precision optical planar components. Not only the precision requirements are getting higher and higher, but also the size is getting larger and larger, which poses new challenges to the manufacture of optical components. . Traditional optical components generally need to go through blanking, grinding, rough polishing, semi-finish polishing, fine polishing and other processes, especially the grinding and polishing process, which not only takes a long time, pollutes the environment, but also causes impurities to penetrate into the processed components. , affects the s...

AI Technical Summary

Problems solved by technology

Traditional optical components generally need to go through blanking, grinding, rough polishing, semi-finish polishing, fine polishing and other processes, especially the grinding and polishing process, which not only takes a long time, pollutes the environment, but also causes impurities to penetrate into the processed components. , affecting the service life of optical components, especially under the action of strong laser light, trace impurities can easily induce defects after repeated actions, resulting in component damage or even scrapping

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