Meter-stage large-opening-diameter optical element CO2 laser polishing device and polishing method

A technology of optical components and laser polishing, which is applied in laser welding equipment, metal processing equipment, welding equipment, etc., can solve the problems of easily induced defects, impurity infiltration, and long time consumption, so as to reduce the difficulty of parameter adjustment, improve the repair effect, and prevent The effect of unstable quality

Active Publication Date: 2020-06-23
NANJING UNIV OF SCI & TECH
View PDF8 Cites 9 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Traditional optical components generally need to go through blanking, grinding, rough polishing, semi-finish polishing, fine polishing and other processes, especially the grinding and polishing process, which not only takes a long time, pollutes the environment, but also caus

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Meter-stage large-opening-diameter optical element CO2 laser polishing device and polishing method
  • Meter-stage large-opening-diameter optical element CO2 laser polishing device and polishing method
  • Meter-stage large-opening-diameter optical element CO2 laser polishing device and polishing method

Examples

Experimental program
Comparison scheme
Effect test

Embodiment

[0032] CO for meter-scale large-aperture optical components 2 Laser polished, the base material is round fused silica glass. The experiment was carried out in a class 10,000 clean room. First, the optical components are cleaned and dried for pretreatment. Then the optical element 3 is fixed on the workbench 1 by the electromagnetic clamp 2, and the optical element 3 faces the laser beam. Adjust laser parameters: laser power 60W, repetition rate 1kHz, pulse width 10μs, focal length 20mm, spot diameter 2mm, galvanometer scanning speed 100mm / s, track interval 1mm, track exceeding fused silica size 1%. The rotating speed of workbench 1 is 1rad / s, the speed of feeding mechanism is 5mm / s, and the image 3 Scanning in a spiral trajectory. After scanning the entire surface of the optical element, reduce the laser power by 5-10W each time, reduce the speed of the feed mechanism by 5-10mm / s, keep the other parameters unchanged, and repeat the scanning for many times until the surfac...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention relates to a meter-stage large-opening-diameter optical element CO2 laser polishing device. On the basis that an optical element does constant-speed motion on a worktable, laser penetrates through a hole in a support, through a reflecting mirror, a light beam is transmitted to a vibrating mirror system composed of a vibrating mirror and a focusing mirror, machining of the optical element is systematically achieved, the reflecting mirror, the vibrating mirror and the focusing mirror which are integrated are mounted on the support and do linear motion in the direction where the laser is incident from the hole, light path transmission cannot be affected by motion of the vibrating mirror system, motion track rough positioning formed by worktable motion and vibrating mirror systemmotion can be achieved well, the self motion of the vibrating mirror system achieves precise positioning of the motion track, according to the device, through the manner of spiral track machining andchanging of parameters, the optical element is scanned, through a fusion and gasifying combined manner, the surface of the optical element is polished, and the device can achieve linear or circumference motion of the meter stage or above.

Description

technical field [0001] The invention relates to the technical field of surface precision and ultra-precision processing of optical elements, in particular to meter-level large-diameter optical elements CO 2 Laser polishing device and polishing method. Background technique [0002] With the development of space optics, aerospace and other science and technology, higher and higher requirements are put forward for precision optical planar components. Not only the precision requirements are getting higher and higher, but also the size is getting larger and larger, which poses new challenges to the manufacture of optical components. . Traditional optical components generally need to go through blanking, grinding, rough polishing, semi-finish polishing, fine polishing and other processes, especially the grinding and polishing process, which not only takes a long time, pollutes the environment, but also causes impurities to penetrate into the processed components. , affects the s...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): B23K26/352B23K26/70B23K26/00
CPCB23K26/352B23K26/70B23K26/00B23K26/702
Inventor 李晓鹏陆广华支新涛王大森王克鸿袁松梅周琦彭勇
Owner NANJING UNIV OF SCI & TECH
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap