Hinge for opening and closing vacuum cavity cover and vacuum treatment device thereof

Abstract

The invention provides a hinge for opening and closing a vacuum cavity cover and a vacuum treatment device thereof. The hinge comprises an upper hinge and a lower hinge; the lower hinge and the lower hinge are connected through a bolt pin; an eccentric shaft is arranged at a lower connecting end of the upper hinge; a connecting hole is eccentrically formed in the eccentric shaft; a slope is arranged at an upper connecting end of the lower hinge, and is positioned below a bolt pin hole; and the slope is provided with a bottom end and an inclined surface. The relative positions of the slope and the eccentric shaft are used for enabling the eccentric shaft to contact with the slope in the rotating process, so that the eccentric shaft is suffered from the acting force of the slope during rotating to slowly rotate so as to prevent overshooting of the vacuum cavity cover; and when a butting end of the upper hinge is contacted with the bottom end of the slope, the eccentric shaft is stopped rotating to further prevent the overshooting problem of the vacuum cavity cover.

Description

technical field [0001] The invention relates to the technical field of semiconductors, in particular to a hinge for opening and closing a vacuum chamber cover and a vacuum processing device thereof. Background technique [0002] Vacuum chambers are widely used in the fields of thin film coating, microelectronics, optical devices and material manufacturing, and are special containers that can adapt to high vacuum environments. When the vacuum chamber is working or stops working, the vacuum chamber cover needs to be closed or opened. Usually, the vacuum chamber cover is lifted or closed by an air column or a linear drive device. When the vacuum chamber cover is fully opened, due to the gravity of the vacuum chamber cover itself, the vacuum chamber cover will overshoot, for example, turn over. In particular, when the door is fully open and in a vertical state, due to the gravity of the door itself and the final speed of the door rotation, the door will overshoot seriously, res...

AI Technical Summary

Problems solved by technology

Usually, the vacuum chamber cover is lifted or closed by an air column or a linear drive device. When the vacuum chamber cover is fully opened, due to the gravity of the vacuum chamber cover itself, the vacuum chamber cover will overshoot, for example, flip over

In particular, when the door is fully open and in a vertical state, due to the gravity of the door itself and the final speed of the door rotation, the door will overshoot seriously, resulting in uncontrollable door movement, and, for Fragile parts cause vibrations that can damage them and generate unwanted particles that damage mechanical support systems

[0003] In addition, when the vacuum chamber door is closed, the vacuum chamber door often hits the sealing ring and other parts on the edge of the vacuum chamber, making these parts loose or prematurely aging, shortening the service life

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