A Line-of-View Dispersion Template Interferometer with Coaxial Illumination
An interferometer and dispersion technology, used in instruments, measuring devices, optical devices, etc., can solve the problem of rapid detection of grooved double-sided glass, etc., and achieve the effects of high precision, large range and high spatial resolution
Active Publication Date: 2019-07-23
BEIJING INSTITUTE OF TECHNOLOGYGY
View PDF6 Cites 0 Cited by
- Summary
- Abstract
- Description
- Claims
- Application Information
AI Technical Summary
Problems solved by technology
[0007] The purpose of the present invention is to solve the problem that the traditional surface shape detection method cannot carry out high-precision and rapid detection of the slot-type double-sided glass, and to provide a coaxial illumination line field-of-view dispersion model interferometer, which can measure the measured glass each time. The error of a generatrix on the surface is detected, supplemented by one-dimensional scanning in the direction of the intercept line, which can realize large-scale, high-precision, high-spatial resolution, fast absolute surface measurement of grooved double-sided glass and optical surfaces whose generatrix is a straight line
Method used
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View moreImage
Smart Image Click on the blue labels to locate them in the text.
Smart ImageViewing Examples
Examples
Experimental program
Comparison scheme
Effect test
Embodiment
[0037] The specific implementation of the present invention will be introduced below by taking the measurement of the inner surface of a protective glass of a mobile phone screen as an example.
[0038] Such as figure 1 , 2 As shown, a line-of-view dispersion template interferometer with coaxial illumination includes a white light extended light source 1, a standard template 3, an aperture stop 4, an imaging lens 5, a field lens 6, a slit 7, a dispersion element 8, and a relay Lens 9, area array detector 10, interferometer body 11, beam splitter;
[0039] The white light extended light source 1 is a line light source, and the length of the line light source is greater than twice the length of the measured glass 2 straight plate;
[0040] The standard template 3 is a reflective surface whose left side surface matches the surface shape of the right side surface of the measured glass 2, and the reflectivity of the reflective surface of the standard template 3 is the same as tha...
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More PUM
Login to View More Abstract
The invention relates to a dispersion template interferometer of the linear view field of coaxial illumination, and belongs to the technical field of photoelectric detection. The interferometer can detect an error of one bus in the surface of measured glass each time, one-dimensional scanning in the section line direction is combined, and thus, a 2D surface-shaped error of double-side glass or reflector with a linear or approximately linear bus can be detected. A measuring result is not influenced by crosstalk of the parallel surfaces, the precision and the spatial resolution are high, a measuring range is wide, sampling points can be encrypted locally, and the interferometer is suitable for high-speed detection for a production line in large-scale industrial production.
Description
technical field [0001] The invention relates to a line-of-view dispersion model interferometer with coaxial illumination, and belongs to the technical field of photoelectric detection. Background technique [0002] The protective glass of the screens of TVs, computer monitors, mobile phones, etc. and the display module usually have a high degree of bonding. Taking mobile phone screens as an example, the bonding degree is required to be on the order of 10 microns. [0003] The traditional parallel plate protective glass surface shape detection can be mainly divided into two types: point measurement and scanning method and two-dimensional imaging measurement from the macroscopic perspective. [0004] The spot scanning method is mainly divided into two types: mechanical probe and optical probe. Using a mechanical probe, such as a three-coordinate measuring machine; using an optical probe, such as coaxial white light (chromatic aberration confocal) measurement. This method ha...
Claims
the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More Application Information
Patent Timeline
Login to View More Patent Type & Authority Patents(China)
IPC IPC(8): G01B11/24G01B9/02
CPCG01B9/02055G01B11/2441
Inventor 王姗姗朱秋东
Owner BEIJING INSTITUTE OF TECHNOLOGYGY