Dispersion template interferometer of linear view field of off-axis illumination
An off-axis illumination and interferometer technology, applied in instruments, measuring devices, optical devices, etc., can solve the problem of inability to quickly detect grooved double-sided glass, and achieve the effects of high precision, high spatial resolution, and large measuring range.
Active Publication Date: 2017-07-07
BEIJING INSTITUTE OF TECHNOLOGYGY
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Problems solved by technology
[0007] The purpose of the present invention is to solve the problem that the traditional surface shape detection method cannot perform high-precision and rapid detection on the slot-type double-sided glass, and provide a line-of-view dispersion sample interferometer with off-axis illumination, which can detect the measured The error detection of a busbar on the glass surface, supplemented by one-dimensional scanning in the direction of the intercept line, can achieve large-scale, high-precision, high-spatial resolution, fast absolute surface measurement of slot-type double-sided glass and optical surfaces whose busbar is a straight line
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[0038] The specific implementation of the present invention will be introduced below by taking the measurement of the inner surface of a protective glass of a mobile phone screen as an example.
[0039] Such as figure 1 , 2 As shown, a line-of-view dispersion template interferometer with off-axis illumination includes a white light extended light source 1, a standard template 3, an aperture stop 4, an imaging lens 5, a field lens 6, a slit 7, a dispersion element 8, and a relay Lens 9, area array detector 10, interferometer body 11;
[0040] The white light extended light source 1 is a line light source;
[0041] The standard template 3 is a reflective surface whose left side surface matches the surface shape of the right side surface of the measured glass 2, and the reflectivity of the reflective surface of the standard template 3 is the same as that of the measured surface 13;
[0042] The imaging lens 5 is a positive lens;
[0043] The field lens 6 is a plano-convex len...
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The invention relates to a dispersion template interferometer of the linear view field of off-axis illumination, and belongs to the technical field of photoelectric detection. The interferometer can detect an error of one bus in the surface of measured glass each time, one-dimensional scanning in the section line direction is combined, and thus, a 2D surface-shaped error of double-side glass or reflector with a linear or approximately linear bus can be detected. A measuring result is not influenced by crosstalk of the parallel surfaces, the precision and the spatial resolution are high, a measuring range is wide, sampling points can be encrypted locally, and the interferometer is suitable for high-speed detection for a production line in large-scale industrial production.
Description
technical field [0001] The invention relates to an off-axis illumination line-field dispersion model interferometer, which belongs to the technical field of photoelectric detection. Background technique [0002] The protective glass of the screens of TVs, computer monitors, mobile phones, etc. and the display module usually have a high degree of bonding. Taking mobile phone screens as an example, the bonding degree is required to be on the order of 10 microns. [0003] The traditional parallel plate protective glass surface shape detection can be mainly divided into two types: point measurement and scanning method and two-dimensional imaging measurement from the macroscopic perspective. [0004] The spot scanning method is mainly divided into two types: mechanical probe and optical probe. Using a mechanical probe, such as a three-coordinate measuring machine; using an optical probe, such as coaxial white light (chromatic aberration confocal) measurement. This method has h...
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IPC IPC(8): G01B11/24G01B9/02
CPCG01B9/02055G01B11/2441
Inventor 朱秋东王姗姗
Owner BEIJING INSTITUTE OF TECHNOLOGYGY