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Processing equipment for processing workpieces in a depressurized space

A processing device and a technology for processed objects, which are applied to workbenches, manufacturing tools, electrical components, etc., can solve problems such as low precision, and achieve the effects of improving conveying precision and suppressing relative movement.

Active Publication Date: 2020-03-06
TOKYO ELECTRON LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

Therefore, the accuracy of conveying the workpiece to the mounting table is low

Method used

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  • Processing equipment for processing workpieces in a depressurized space
  • Processing equipment for processing workpieces in a depressurized space
  • Processing equipment for processing workpieces in a depressurized space

Examples

Experimental program
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Embodiment Construction

[0050]Hereinafter, various embodiments will be described in detail with reference to the drawings. In addition, the same code|symbol is attached|subjected to the same or equivalent part in each drawing.

[0051] figure 1 It is a figure which schematically shows the processing apparatus of one embodiment. figure 1 The shown processing device 10 is configured as a film formation device. The processing device 10 has a processing container 12 . The internal space of the processing container 12 is a depressurizable space, and the internal space of the processing container 12 can be depressurized by an exhaust device. The processing container 12 includes a main body 12a and a lid 12b. The main body part 12a is formed in substantially cylindrical shape, and is opened at the upper end. In one embodiment, the main body portion 12a is formed in a substantially cylindrical shape, and the central axis of the main body portion 12a coincides with the axis AX. An opening for carrying i...

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PUM

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Abstract

The present disclosure provide a processing apparatus capable of suppressing generation of particles, which is caused by moving a plurality of lift pins relative to a stage of the processing apparatus, while improving accuracy of transferring a workpiece onto the stage. In a processing apparatus according to one embodiment, a stage is installed inside a process chamber. The stage has a plurality of through-holes formed therein, which corresponds to a plurality of lift pins. The plurality of lift pins is supported by a spline shaft through a support body. The spline shaft is supported by a spline bearing such that the spline shaft is vertically moved. The plurality of lift pins is biased upward by a spring member through the spline shaft. The spline shaft, the spline bearing, and the spring member are installed in an outer space separated from a depressurizable inner space of the process chamber.

Description

technical field [0001] An embodiment of the present invention relates to a processing device for processing a workpiece in a depressurized space. Background technique [0002] In the manufacture of electronic devices, various processes are performed on workpieces such as semiconductor substrates. Such processing includes processing performed under a reduced pressure environment, such as processing such as film formation and etching. [0003] The processing of a workpiece under a reduced pressure environment can use a processing device having a processing container provided with an internal space capable of reducing pressure. The handling device also typically includes a mounting table and a plurality of lift pins. The mounting table supports a workpiece mounted thereon, and a plurality of through holes are formed in the mounting table. The lift pin can be inserted into a plurality of through holes. When this processing apparatus is used, a to-be-processed object is carri...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/683
CPCB25H1/08B25H1/16H01L21/6835H01L21/68742H01L21/68764
Inventor 海濑拓也曾根浩铃木直行
Owner TOKYO ELECTRON LTD
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