Light-gas combined detector

A composite detector and gas technology, applied in the field of sensors, can solve the problems of increased cost of use and low integration of detectors, and achieve the effect of improving the effect

Inactive Publication Date: 2017-07-25
黄晓敏
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  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

[0003] However, there are few detectors that are integrated on a substrate and can detect gas and light at the same time in the market. Usually, gas and light are detected by combining detectors that detect gas and photoelectricity respectively, which leads to the integration of detectors. The problem is that the degree is not high and the cost of use increases

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Embodiment Construction

[0020] In order to facilitate the understanding of the present invention, the present invention will be described more fully below with reference to the associated drawings. Preferred embodiments of the invention are shown in the accompanying drawings. However, the present invention can be embodied in many different forms and is not limited to the embodiments described herein. On the contrary, these embodiments are provided to make the understanding of the disclosure of the present invention more thorough and comprehensive.

[0021] The present invention will be further described in detail below in conjunction with the accompanying drawings and specific embodiments.

[0022] see figure 1 , figure 2 , the present invention provides a kind of light and gas composite detector, it is characterized in that, comprises:

[0023] α-alumina substrate 1;

[0024] The α-alumina substrate 1 is divided into three parts: the first part 2, the second part 3 and the third part 4, which ...

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Abstract

The invention provides a light and gas composite detector, comprising a porous tin oxide layer as the gas sensing layer of the gas detection part, a cadmium sulfide layer and a copper indium gallium selenide sulfur layer with a gradually changing composition are used in the light detection part, and the gas sensor is It is integrated with the photoelectric sensor on the same substrate, and the detection circuit is formed on the substrate at the same time, so that a sensor can detect gas and photocurrent at the same time, and a new structure is designed, using cadmium sulfide layer and copper indium with gradual composition The gallium selenide sulfur layer improves the effect of light detection and provides a novel light and gas composite detector.

Description

technical field [0001] The invention relates to a sensor, in particular to a light and gas composite detector. Background technique [0002] A gas sensor is a converter that converts a certain gas volume fraction into a corresponding electrical signal. At present, there are many types of gas sensors, which can be divided into semiconductor type and solid electrolyte type according to the gas-sensitive materials used and their gas-sensitive characteristics. , electrochemical formula, contact combustion type, etc. Photoelectric detection technology has a wide range of applications in ultraviolet radiation detection, environmental monitoring, chemical composition analysis, sewage detection and treatment, disaster warning, food hygiene, medical health, wireless encrypted communication, etc. Because wide bandgap semiconductors (WBG, such as gallium nitride, silicon carbide, zinc oxide, etc.) have the property of not absorbing visible light, they have received extensive attention...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01D21/02H01L27/144H01L31/0336
CPCG01D21/02H01L27/144H01L31/0336
Inventor 黄晓敏
Owner 黄晓敏
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