Nanoscale initial laser damage detection method and system based on in-situ detection

Abstract

The invention relates to a nano-scale initial laser damage detection method based on an in-situ detection technology and a system thereof. The method comprises the following steps of setting a plurality of mark points in an area to be tested of a sample and defining the mark points to be positioning points; finding the positioning points under an atomic force microscope, taking the positioning points as a reference, moving a certain relative coordinate so as to acquire a tested area, and testing a morphology; selecting a damage test point, and carrying out laser damage threshold testing on the sample; under a damage test device, using a laser light spot which is lower than a laser damage threshold to irradiate the tested area; finding the tested area under the atomic force microscope again and testing the morphology; comparing the two morphologies, carrying out correction according to a comparison result, determining whether a nanoscale changes; and if the nanoscale does not change, increasing laser energy of the laser light spot under the condition that a threshold is lower than the laser damage threshold till that the nanoscale changes. Compared to the prior art, the method and the system of the invention possess advantages that accuracy is high; repeatability is good; and the structure is simple and so on.

Description

technical field [0001] The invention relates to a damage detection method for an optical element, in particular to a nanoscale initial laser damage detection method and system based on in-situ detection. Background technique [0002] Optical components are essential basic elements in optical systems, and are widely used in laser processing, laser weapons, and high-power laser systems. With the continuous improvement of laser output energy, laser damage of optical components has become a weak link that restricts the development of laser technology to high energy and high power, and restricts the further development of strong laser technology. In order to deeply analyze the damage performance and damage mechanism of optical components, and accurately evaluate the anti-laser damage ability of optical components, it is necessary to continuously develop and improve the testing technology of laser damage. At present, the research on the laser damage performance and damage mechani...

AI Technical Summary

Problems solved by technology

At present, the research on the laser damage performance and damage mechanism of optical components at home and abroad is mostly in the range of microns, and the research on damage below the micron scale, that is, the development process of damage from scratch still needs to be further studied.

Images