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Piezoelectric element and piezoelectric element-applied device

A technology of piezoelectric elements and application equipment, applied in piezoelectric devices/electrostrictive devices, electrical components, piezoelectric/electrostrictive/magnetostrictive devices, etc.

Active Publication Date: 2017-08-18
SEIKO EPSON CORP
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In addition, such problems are not limited to piezoelectric elements mounted in inkjet recording heads, but also exist in piezoelectric MEMS elements, ultrasonic sensor elements, piezoelectric actuator elements, and the like.

Method used

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  • Piezoelectric element and piezoelectric element-applied device
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  • Piezoelectric element and piezoelectric element-applied device

Examples

Experimental program
Comparison scheme
Effect test

Embodiment approach 1

[0033] First, refer to figure 1 An ink jet recording device as an example of a liquid ejecting device will be described.

[0034] figure 1 A schematic configuration of an inkjet recording device is shown. As shown in the figure, in the ink jet recording device (recording device I), the ink jet recording head unit (head unit II) is detachably provided on the ink cartridge 2A and the ink cartridge 2B. The ink cartridge 2A and the ink cartridge 2B constitute an ink supply mechanism. The head unit II has a plurality of ink-jet recording heads (recording head 1, cf. figure 2 etc.), and mounted on the carriage 3. The carriage 3 is provided freely movable in the axial direction on a carriage shaft 5 attached to the device main body 4 . The head unit II and the carriage 3 are configured to be able to eject a black ink composition and a color ink composition, respectively, for example.

[0035] Further, the driving force of the driving motor 6 is transmitted to the carriage 3 vi...

Embodiment

[0085] Hereinafter, the present invention will be described more specifically by showing examples. In addition, this invention is not limited to a following Example.

[0086] Production of Sample 1

[0087] First, a silicon oxide (SiO 2 ) film (elastic film 51). Next, by utilizing the RF magnetron sputtering method, the SiO 2 A titanium film with a film thickness of 40nm is formed on the film, and the titanium film is thermally oxidized to form titanium oxide (TiO x ) film (adhesive layer 56). Next, by RF magnetron sputtering method, on TiO x The (111) plane was oriented on the film to form a platinum (Pt) film (first electrode 60 ) with a film thickness of 100 nm.

[0088] Next, mix lead(II) acetate trihydrate, nickel(II) acetate tetrahydrate, penta-n-butoxyniobium, tetrakis(2,4-pentanedione)zirconium(IV), and tetraisopropoxy Titanium, butyl cellosolve as a main solvent, diethanolamine as a stabilizer, and polyethylene glycol as a thickener were added to prepare a prec...

Embodiment approach

[0118] In Embodiment 1 described above, an inkjet type recording head has been described as an example of a liquid ejection head, but the present invention can of course also be applied to a liquid ejection head that ejects liquids other than ink. As a liquid ejection head that ejects liquid other than ink, for example, a color material ejection head used in the manufacture of a color filter such as a liquid crystal display, an organic EL display, an electrode formation device such as an FED (Field Emission Display), etc., can be cited. The electrode material injection head, the biological organic material injection head used in the manufacture of biochips, etc.

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Abstract

The invention provides a piezoelectric element and a piezoelectric element-applied device. The piezoelectric element includes a first electrode, a second electrode, and a piezoelectric layer disposed between the first and second electrodes. The piezoelectric layer is made from a perovskite composite oxide represented by Pb(Ni, Nb, Zr, Ti)O, in which the total of the Ni and Nb contents in the perovskite composite oxide is 1 [mol %] or more and 5 [mol %] or less with respect to the total content of elements included in a B site.

Description

technical field [0001] The present invention relates to a piezoelectric element with excellent displacement characteristics and a piezoelectric element application device. Background technique [0002] Generally, a piezoelectric element has a piezoelectric layer having electromechanical conversion properties, and two electrodes sandwiching the piezoelectric layer. In recent years, development of devices using such piezoelectric elements as a driving source (piezoelectric element-applied devices) has been actively carried out. Examples of piezoelectric element application equipment under development include liquid ejection heads represented by inkjet recording heads, MEMS components represented by piezoelectric MEMS elements, ultrasonic measuring devices represented by ultrasonic sensors, and pressure sensors. electric actuators etc. [0003] The piezoelectric material used for the piezoelectric layer is required to have high piezoelectric characteristics. As such a piezoel...

Claims

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Application Information

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IPC IPC(8): H01L41/047H01L41/08B41J2/14
CPCB41J2/14201H10N30/87H10N30/00
Inventor 板山泰裕
Owner SEIKO EPSON CORP