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Scanning probe microscope

A probe microscope and scanning technology, applied in the field of scanning probe microscope, to achieve the effect of easy operation

Inactive Publication Date: 2017-08-18
SHIMADZU SEISAKUSHO CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0015] However, since such an atomic force microscope (AFM) 101 can measure the surface information of the sample S with atomic-level resolution, it is easily affected by disturbances such as noise, vibration from the floor, or the driving mechanism.

Method used

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  • Scanning probe microscope
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Embodiment Construction

[0039] Embodiments of the present invention will be described below using the drawings. In addition, this invention is not limited to embodiment as demonstrated below, It goes without saying that various aspects are included in the range which does not deviate from the summary of this invention.

[0040] figure 1 It is a perspective view showing the overall configuration of an atomic force microscope, which is an embodiment of the present invention, figure 2 is showing figure 1 Side view of the SPM main body part with the wireless bracket part. also, image 3 is showing figure 1 A schematic diagram of the internal configuration of an atomic force microscope. In addition, the same code|symbol is attached|subjected to the same structure as the atomic force microscope (AFM) 101.

[0041] Atomic force microscope (AFM) 1 possesses: SPM main body 10; Control unit 30 controls SPM main body 10 as a whole; Wireless support 60; Computer 50; Power signal cable 42, connects wire...

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Abstract

The invention provides a scanning probe microscope capable of eliminating influence of vibration noise and obtaining, accurately and with high resolution, surface information about a sample S. The scanning probe microscope (1) comprises: a body unit (10) and a control unit (30). The body unit comprises a cantilever (21) that has a probe (21a), a sensor (23) for detecting displacement of the cantilever (21), an XYZ drive mechanism (25) for moving the cantilever (21) or the sample S, and a vibration isolation mechanism (12). The control unit (30) is used for controlling the XYZ drive mechanism (25) to acquire surface information about a measured area of the sample S. The scanning probe microscope (1) further comprises: a wireless stand (60) having a power feeding coil (63) and a stand-side transmission / reception portion 64); and a power supply signal cable (42) connecting the wireless stand (60) and the control unit (30). The body unit (10) has: a high voltage generating circuit (15) for driving the XYZ drive mechanism (25); a power receiving coil (13); and a body-unit-side transmission / reception portion (14) for communicating with the stand-side transmission / reception portion (64).

Description

technical field [0001] The present invention relates to a scanning probe microscope for acquiring surface information of a sample based on the interaction between a sample surface and a probe (Probe), and more particularly to a scanning probe microscope for acquiring surface information of a measurement range of a sample. Background technique [0002] In a scanning probe microscope, using a scanner (XYZ drive mechanism) or the like in the X direction, Y direction, or Z direction, the probe formed at the free end of the cantilever is moved relative to the sample, or the sample is moved relative to the sample. The probe formed at the free end of the cantilever moves and detects the interaction between the probe and the sample surface (the amount of displacement of the probe or the change in resonance frequency), and high resolution is achieved based on the detected information. The surface shape (surface information) of the measurement range of the sample is accurately prepare...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q90/00
CPCG01Q30/18G01Q10/04
Inventor 池田雄一郎
Owner SHIMADZU SEISAKUSHO CO LTD