119 results about "Scanning Hall probe microscope" patented technology

A scanning probe microscope has an XY scanner for making a probe scan a sample surface, an approach and separate drive element for making the probe approach to the sample surface at a sampling position and separate the probe from the sample surface during movement between the sampling positions, and a servo controller for holding the distance between the probe and the sample surface at a reference distance during measurement at the sampling position. A plurality of scattered measurement locations are set away from each other as sampling positions. The approach and separation movements are performed at each sampling position. When measuring the surface by the probe at a sampling position and while making the probe move between sampling positions, servo control by the servo controller is continued. This makes it possible to quickly measure the surface by a simple controller and possible to measure a wide area or measure a high aspect ratio. When making the probe approach to the sample surface for measurement at the sampling position, it is also possible to cause a scan motion for tandem movement at an equal speed and in the same direction as the scan motion by the XY scanner.

The present invention provides a method of using an accurate three-dimensional shape without damaging a sample by making a probe contact the sample only at a measuring point, lifting and retracting the probe when moving to the next measuring point and making the probe approach the sample after moving to the next measuring point, wherein high frequency/minute amplitude cantilever excitation and vibration detection are performed and further horizontal direction excitation or vertical/horizontal double direction excitation are performed to improve the sensitivity of contacting force detection on a slope of steep inclination. The method uses unit for inclining the probe in accordance with the inclination of a measurement target and a structure capable of absorbing or adjusting the orientation of the light detecting the condition of contact between the probe and sample after reflection on the cantilever, which varies a great deal depending on the inclination of the probe.

In a scanning probe microscope, a nanotube and metal nano-particles are combined together to configure a plasmon-enhanced near-field probe having an optical resolution on the order of nanometers as a measuring probe in which a metal structure is embedded, and this plasmon-enhanced near-field probe is installed in a highly-efficient plasmon exciting unit to repeat approaching to and retracting from each measuring point on a sample with a low contact force, so that optical information and profile information of the surface of the sample are measured with a resolution on the order of nanometers, a high S/N ratio, and high reproducibility without damaging both of the probe and the sample.

Cantilever for a scanning probe microscope (SPM) including a substrate having a tip, a piezoactuator on the substrate movable in response to an external electric signal, and a sensor formed around the piezoactuator so as not to overlap with the piezoactuator, thereby minimizing inner couplings.

A method of controlling a scanner, particularly a scanner for use in scanning probe microscopes such as an atomic force microscope, including the steps of generating a scan voltage which varies as a parametric function of time, applying the scan voltage to the scanner, sensing plural positions of the scanner upon application of the scan voltage, fitting a parametric function to the sensed scanner positions, and controlling at least one parameter of the scan voltage function based on the parametric function fitted to the sensed scanner positions in the fitting step. In a preferred embodiment, the scan voltage is a polynomial parametric function of time and the order of terms of the polynomial is set in relation to the size of the scan being controlled, with small scans having at least one order term and relatively larger scans having plural order terms. Thus, the sensed position data are used, not to control the motion of the scanner directly in a closed loop system, but instead to optimize the transducer calibration parameters for subsequent open looped scan control of a portion of a total scan, with the calibration of the transducer scan voltage parameters periodically occurring.

There is disclosed a scanning probe microscope for producing a topographic image of a surface of a sample by noncontact AFM (atomic force microscopy). First, a first topographic image of the sample undergoing magnetic effects is produced from the resonance frequency of a cantilever by FM detection. Then, a second topographic image of the sample free of magnetic effects is produced from the amplitude of the cantilever by slope detection. The difference between these two topographic images is taken. Thus, a magnetic force image is produced.

The invention discloses a home position micro area structure analyzing and nature detecting combination system, comprising transmission electron microscope and scanning probe microscope which includes electronics system and mechanical system. Mechanical system is installed in air tight air tight having the same size with probe (or sample), adjusting position of probe (or sample) in the space range can be observed, and the electronics system controls mechanical system working and processing signal detected. Combining advantages of transmission electron microscope and scanning probe, the system records atom structure of material microarea and physical property of home position real time, makes physical property of microarea have coincidence with microstructure, operates double probe of scanning probe microscope adjusts position of sample and does physical property measure, reentrancy again and location survey to separate nanometer structure.

A combination confocal and scanning probe microscope system permits accurate location of a sample within the field of view as the sample translates from one type of microscope to the other. Alternate embodiments permit both microscopes to view the same sample location at the same time. Further alternate embodiments include a confocal and a probe microscope integrated into a common optical path.

The present invention relates to a modular scanning probe microscope combined with inverted fluorescence microscope. It is formed from five modules, in which the first module is inverted fluorescence microscope, second module is three-jaw approaching device, third module is scanning head, fourth module includes transparent sample table and X, Y and Z three-dimensional scanner and fifth module is laser microscopic extension module. Said invention also provides its working principle and concrete operation method.

A high-accuracy measurement manner of a scanning probe microscope comprises the following steps: respectively fixing a standard sample and a sample to be detected on the upper and the lower surfaces of an xy micro-displacement mobile platform; and respectively arranging an atomic force microscope (1) and a scanning tunneling microscope (2) on and below the xy micro-displacement mobile platform (3). The scanning tunneling microscope (2) is used for recording the profile of the standard sample, and the atomic force microscope is used for recording the profile of the sample. Since the standard sample and the sample have fixed positions, the error caused by platform jitter or other vibration in the scanning process can be simultaneously represented by the profile signals of the standard sample and the sample. The standard sample is selected from a graphite sample which has a profile with periodicity, based on which the error caused by each vibration in the scanning process can be obtained. The accurate profile of the sample can be obtained by integrating the error with the profile signal of the sample.

In a near-field scanning microscope using an aperture probe, the upper limit of the aperture formation is at most several ten nm in practice. In a near-field scanning microscope using a scatter probe, the resolution ability is limited to at most several ten nm because of the external illuminating light serving as background noise. Moreover, measurement reproducibility is seriously lowered by a damage or abrasion of a probe. Optical data and unevenness data of the surface of a sample can be measured at a nm-order resolution ability and a high reproducibility while damaging neither the probe nor the sample by fabricating a plasmon-enhanced near-field probe having a nm-order optical resolution ability by combining a nm-order cylindrical structure with nm-order microparticles and repeatedly moving the probe toward the sample and away therefrom at a low contact force at individual measurement points on the sample.

The piezoelectric response of a sample is measured by applying a scanning probe microscope, whose probe is in contact with the sample The probe is mounted to a cantilever and an actuator is driven by a feedback loop to oscillate at a resonance frequency f. An AC voltage with principally the same frequency f but with a phase (with respect to the oscillation) and/or amplitude varying periodically with a frequency fmod is applied to the probe for generating a piezoelectric response of the sample A lock-in detector measures the spectral components at the frequency fmod of the control signals (K, f) of the feedback loop. These components describe the piezoelectric response and can be recorded as output signals of the device. The method allows a reliable operation of the resonator at its resonance frequency and provides a high sensitivity.

The invention discloses a probe inserting device of a scanning probe microscope. A stepping motor (8) is fixed on a base of the probe inserting device of the scanning probe microscope in a direction perpendicular to a horizontal direction, wherein the stepping motor (8) is connected with a piezoelectric ceramic scanner (7); a sample platform (11) is arranged on the piezoelectric ceramic scanner (7); the tip of a probe (2) is downward and the probe (2) is positioned rightly over the sample platform (11); a laser source (9) is installed above the probe (2); a photoelectric sensor (10) is positioned above the probe and is used for receiving a position signal of a light spot reflected by the probe (2), converting the position signal of the light spot into a voltage signal and sending the voltage signal into a controller (4); the stepping motor (8) is controlled by the controller (4) to drive a sample to approach the probe (2); the probe inserting device of the scanning probe microscope further comprises a dual-channel reflective optical fiber displacement sensor; and the distance between the probe and the surface of the sample is detected by the dual-channel reflective optical fiber displacement sensor. Under the control of the controller, the thick probe inserting speed is increased; and in combination with thin probe insertion control, the probe inserting device realizes quick probe insertion.

An automatic probe exchange system for a scanning probe microscope (SPM) exchanges probes between a probe mount on the SPM and a probe mount on a probe tray based on differential magnetic force. When the magnetic force on the SPM side is greater, the probe is attached to the probe mount on the SPM. When the magnetic force on the probe tray side is greater, the probe is attached to the probe mount on the probe tray. The magnetic force on the probe tray side is varied by moving the magnets that generate the magnetic force on the probe tray side closer to or further from the probe.

The invention relates to a near-field polarized light scanning probe microscope having a near-field optics detecting optical path in which a bundle of linearly polarized lights emitted from an He-Ne laser successively pass a quarter-wave plate A, a beam splitter, an objective lens A, and a probe to an objective table to form a near-field optics generation optical path. The reflected lights reflected from the probe successively pass the objective lens A, the beam splitter, a quarter-wave plate B, a Glan-Taylor prism, and the objective lens and are received by a photoelectric receiver to an image display system. The near-field polarized light scanning probe microscope can effectively inhibit a far-field background light and improves the signal to noise ratio of a near-field light, and the spatial resolution is less than 10 nanometers.

A dynamic probe detection system (29,32) is for use with a scanning probe microscope of the type that includes a probe (18) that is moved repeatedly towards and away from a sample surface. As a sample surface is scanned, an interferometer (88) generates an output height signal indicative of a path difference between light reflected from the probe (80a,80b,80c) and a height reference beam. Signal processing apparatus monitors the height signal and derives a measurement for each oscillation cycle that is indicative of the height of the probe. This enables extraction of a measurement that represents the height of the sample, without recourse to averaging or filtering, that may be used to form an image of the sample. The detection system may also include a feedback mechanism that is operable to maintain the average value of a feedback parameter at a set level.

The invention discloses an electrochemical needle point enhanced Raman spectrometry instrument based on a scanning probe microscope. The electrochemical needle point enhanced Raman spectrometry instrument is characterized by comprising a scanning head of the scanning probe microscope, and an atmosphere controlled and matched in-situ spectrum electrolytic cell body which can be matched with a conventional commercial spectrometer laser collection module. The scanning head of the scanning probe microscope adopts a special design, a sample is driven to realize XYZ morphology scanning by adopting piezoelectric ceramics, and the scanning probe is fixed on the electrolytic cell still; the instrument structure is designed based on the lens of undersea glasses, so as to realize maximum excitation and collection efficiency of an electrochemical liquid; although the instrument is based on an inverted mode, the instrument can be used for researching transparent and opaque samples; and oxygen removal seal of the system is realized by adopting an isolation hood, the influence of the oxygen on the system research is avoided, solution volatilization is avoided, and an atmosphere inside a cavity can be controlled through an air inlet/outlet.

A method and apparatus of scanning a sample with a scanning probe microscope including scanning a surface of the sample according to at least one scan parameter to obtain data corresponding to the surface, and substantially automatically identifying a transition in the surface. Based on the identified transition, the sample is re-scanned. Preferably, the resultant data is amended with data obtained by re-scanning the transition.

The micro mirror box for scanning probe microscope includes an electrostrictive stepped unit, an electrostrictive scanning tube, a box, a box cover, a sample seat, a probe, a probe rack, a communication interface and a pumping hole, as well as a sample cutting push rod and an auxiliary probe. The probe and the auxiliary probe may be available probe for scanning tunnel microscope, atomic force microscope and/or magnetic microscope. The present invention has the features of simple and reasonable structure, low cost, small size, etc. and is favorable to raising vacuum degree, lowering temperature, raising S/N ratio, raising signal stability, etc. It may be used for vacuum cutting, vacuum probe replacement and scanning with different kinds of probe, in scanning tunnel microscope, atomic force microscope, magnetic microscope and their combination.

The invention relates to a method for operating a measurement system containing a scanning probe microscope, in particular an atomic force microscope, and to a measurement system for examining a measurement sample using a scanning probe microscope and for optically examining said sample. In the method, an optical image of a measurement section of a measurement sample to be examined, said image being recorded with the aid of an optical recording device, is displayed on a display apparatus, a choice of a position in the optical image is detected, and, for a scanning probe measurement, a measurement probe which is configured for the scanning probe measurement is moved, using a movement apparatus which moves the measurement probe and the measurement sample relative to one another, to a measurement position, which is assigned to the selected position in the optical image in accordance with coordinate transformation, by virtue of the movement apparatus being controlled in accordance with the coordinate transformation, wherein a previously determined assignment between a coordinate system of the optical image and a coordinate system of a space covered by movement positions of the measurement probe and the measurement sample is formed with the coordinate transformation, wherein the movement positions comprise the measurement position.

A scanning force microscope system that employs a laser (76) and a probe assembly (24) mounted in a removable probe illuminator assembly (22), that is mounted to the moving portion of a scanning mechanism. The probe illuminator assembly may be removed from the microscope to permit alignment of said laser beam onto a cantilever (30) after removal. This prevents damage to, and shortens alignment time of, the microscope during replacement and alignment of the probe assembly. The scanning probe microscope assembly (240) supports a scanning probe microscope (244). Scanning probe microscope (244) holds a removable probe sensor assembly (242). Removable probe sensor assembly (242) may be transported and conveniently attached to the adjustment station (250) where the probe sensor assembly parameters may be observed and adjusted if necessary. The probe sensor assembly (242) may then be attached to the scanning probe microscope (244).

A scanning probe microscope system capable of identifying an element with atomic scale spatial resolution comprises: an X-ray irradiation means for irradiating a measurement object with high-brilliance monochromatic X-rays having a beam diameter smaller than 1 mm; a probe arranged to oppose to the measurement object; a processing means for detecting and processing a tunneling current through the probe; and a scanning probe microscope having an alignment means for relatively moving the measurement object, the probe, and the incident position of the high-brilliance monochromatic X-rays to the measurement object.

A magnetic head inspection device inspects the write track width of a thin film magnetic head in a phase as early as possible during the manufacturing process. A recording signal (excitation signal) is input from bonding pads to the thin film magnetic head in a rowbar, and the magnetic field generated by the write pole (element) included in the thin film magnetic head is observed directly by using a magnetic force microscope (MFM), a scanning Hall probe microscope (SHPM), or a scanning magneto resistance effect microscope (SMRM) that performs a scanning motion at a position equivalent to the flying height of the magnetic head. In this manner, a shape of the generated magnetic field instead of the physical shape of the write pole (element) is measured; thus, a non-destructive inspection can be performed on the effective magnetic track width.