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Method and apparatus of operating scanning probe microscope

A scanning probe and microscope technology, applied in the field of scanning probe microscopy, can solve the problems of time-consuming, unresolved dynamic characteristics of AFM imaging, low efficiency, etc.

Active Publication Date: 2012-12-26
BRUKER NANO INC
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

That is, TappingMode TM AFM has the disadvantage that it is difficult to control the normal force applied to the sample surface
Although this process may work well enough for experienced AFM operators, it is inefficient, time-consuming, and often suboptimal
Additionally, it does not address the dynamic nature of AFM imaging, which typically requires the operator to change certain settings in real-time during operation, or to observe the image, etc., go back and rescan those parts of the sample where the image intersects with the adjusted parameter values
Again, this process can be very slow

Method used

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  • Method and apparatus of operating scanning probe microscope
  • Method and apparatus of operating scanning probe microscope
  • Method and apparatus of operating scanning probe microscope

Examples

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Embodiment Construction

[0116] Embodiments are directed to the Peak Force Tapping (PFT) mode of AFM operation, where the interaction force between the probe (tip) and the sample is monitored and used to control the tip-sample separation at very low forces and without Loss of scanning speed. The technique described herein provides high resolution by keeping probe tip-sample forces low and enables essentially real-time property mapping of the sample surface. Preferred embodiments are inherently stable and thus facilitate long-term force control while maintaining the ability to capture high integrity data (increased resolution). Also, unlike traditional TappingMode, since no tuning is required TM Like AFM, AFM setup is faster and easier than with other AFM modes. The key concepts driving the PFT mode are graphically illustrated and discussed herein.

[0117] In practice, there are three main problems to be solved before AFM using instantaneous interaction forces can be realized. These issues are: 1...

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Abstract

An improved mode of AFM imaging (peak force tapping (PFT) mode) uses force as the feedback variable to reduce tip-sample interaction forces while maintaining scan speeds achievable by all existing AFM operating modes. Sample imaging and mechanical property mapping are achieved with improved resolution and high sample throughput, with the mode being workable across varying environments(including gaseous, fluidic and vacuum). Ease of use is facilitated by eliminating the need for an expert user to monitor imaging.

Description

[0001] Cross References to Related Applications [0002] This application claims priority under 35 U.S.C. §119(e) to U.S. Provisional Patent Application No. 61 / 114,399, filed November 13, 2008, which is incorporated herein by patent in its entirety. technical field [0003] The present invention is directed to scanning probe microscopes (SPM), including atomic force microscopes (AFM), and more particularly to modes of AFM operation that provide force control at high speed, small tip-sample interaction forces, and high resolution. Background technique [0004] Scanning Probe Microscopes (SPM), such as Atomic Force Microscopes (AFM), are devices that typically characterize surfaces down to atomic dimensions using a probe that has a tip and allows the tip to interact with the sample surface with low force. Typically, probes are introduced to the surface of a sample to detect changes in sample characteristics. By providing a relative scanning movement between the tip and the sa...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q60/24G01B21/20
CPCG01Q60/32B82Y35/00G01Q20/00G01Q60/34G01Q10/065G01B21/20G01Q60/00G01Q60/24H01R4/56H01R13/6315H01R2103/00
Inventor Y·胡S·胡C·苏J·石J·马
Owner BRUKER NANO INC
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