Probe inserting device of scanning probe microscope and method thereof

Abstract

The invention discloses a probe inserting device of a scanning probe microscope. A stepping motor (8) is fixed on a base of the probe inserting device of the scanning probe microscope in a direction perpendicular to a horizontal direction, wherein the stepping motor (8) is connected with a piezoelectric ceramic scanner (7); a sample platform (11) is arranged on the piezoelectric ceramic scanner (7); the tip of a probe (2) is downward and the probe (2) is positioned rightly over the sample platform (11); a laser source (9) is installed above the probe (2); a photoelectric sensor (10) is positioned above the probe and is used for receiving a position signal of a light spot reflected by the probe (2), converting the position signal of the light spot into a voltage signal and sending the voltage signal into a controller (4); the stepping motor (8) is controlled by the controller (4) to drive a sample to approach the probe (2); the probe inserting device of the scanning probe microscope further comprises a dual-channel reflective optical fiber displacement sensor; and the distance between the probe and the surface of the sample is detected by the dual-channel reflective optical fiber displacement sensor. Under the control of the controller, the thick probe inserting speed is increased; and in combination with thin probe insertion control, the probe inserting device realizes quick probe insertion.

Description

technical field [0001] The invention relates to a scanning probe microscope (SPM) needle insertion device and a needle insertion method. Background technique [0002] Scanning probe microscopy (SPM), as a high-resolution three-dimensional shape detection instrument, has not only been widely used in the field of biology, but also has been highly valued by the semiconductor industry (T.Ando, ​​"High-speed atomic force microscopy coming ofage”, Nanotechnology, 2012, 23:06200-062028.). When SPM scans the surface of the sample, the probe on the micro-cantilever interacts with the sample, causing the micro-cantilever to deflect. The deflection signal is used to characterize the topography of the sample surface, and can achieve high resolution at the atomic level. According to the different interaction modes between the probe and the sample surface, SPM can realize multi-information measurement such as surface magnetic field, carrier concentration distribution, surface capacitance...

AI Technical Summary

Problems solved by technology

[0006] The purpose of the present invention is to overcome the shortcomings of the existing SPM rapid needle advance device, such as complex structure, high cost, low environmental adaptability, and inconvenient operation, and provide a new type of rapid needle advance device and method. The present invention can not only realize rapid needle advance , and has the characteristics of simple structure, low cost, strong adaptability, easy operation, etc., can be easily integrated into different SPM structures, and is suitable for on-site automatic detection in the semiconductor industry

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