Looking for breakthrough ideas for innovation challenges? Try Patsnap Eureka!

High precision measurement method of scanning probe microscope

A measurement method and microscope technology, applied in measurement devices, instruments, etc., can solve problems such as affecting scanning accuracy

Inactive Publication Date: 2008-12-17
INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
View PDF0 Cites 18 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

The occurrence of this situation will affect the accuracy of scanning. Now it is necessary to solve this problem, and it is necessary to ensure that the scanning speed does not decrease and the scanning range does not decrease.

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • High precision measurement method of scanning probe microscope
  • High precision measurement method of scanning probe microscope
  • High precision measurement method of scanning probe microscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment Construction

[0019] Apparatus for applying the method of the present invention such as figure 2 As shown, the standard sample is fixed on the lower surface of the xy micro-displacement mobile platform, and the tested sample is fixed on the upper surface of the xy micro-displacement mobile platform. Two sets of scanning probe microscopes: the scanning tunneling microscope is equivalent to a reference system, which is placed below the xy micro-displacement mobile platform, and the atomic force microscope is placed above the xy micro-displacement mobile platform as a measurement system. When the xy micro-displacement mobile platform moves, the atomic force microscope and scanning tunneling microscope will simultaneously read the topography data of the measured sample and the standard sample. The topography data of the standard sample read by the scanning tunneling microscope is a medium through which the error signal caused by the vibration during the scanning process is obtained.

[0020] ...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

A high-accuracy measurement manner of a scanning probe microscope comprises the following steps: respectively fixing a standard sample and a sample to be detected on the upper and the lower surfaces of an xy micro-displacement mobile platform; and respectively arranging an atomic force microscope (1) and a scanning tunneling microscope (2) on and below the xy micro-displacement mobile platform (3). The scanning tunneling microscope (2) is used for recording the profile of the standard sample, and the atomic force microscope is used for recording the profile of the sample. Since the standard sample and the sample have fixed positions, the error caused by platform jitter or other vibration in the scanning process can be simultaneously represented by the profile signals of the standard sample and the sample. The standard sample is selected from a graphite sample which has a profile with periodicity, based on which the error caused by each vibration in the scanning process can be obtained. The accurate profile of the sample can be obtained by integrating the error with the profile signal of the sample.

Description

technical field [0001] The invention relates to a high-precision measuring method of a scanning probe microscope. Background technique [0002] In recent years, the scanning speed of scanning probe microscope has been continuously improved. At present, the imaging speed of a 100nm image can reach up to 0.64s / frame. It can be approximated that the requirement of instant imaging has been met, so high-speed scanning probe microscope has become a useful tool and is widely used in life sciences, semiconductor manufacturing processes and other fields. [0003] Scanning probe microscopes are used to measure nanometer-scale lengths, so any perturbation can affect the measurement results, such as: vibration of the workbench, vibration of the stand, or even a sound source, which may cause noise on the graph. So in the process of measurement, people often use the isolation room. The isolation room has a certain effect on noise and external vibration, but it has little effect on the v...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01B21/20
Inventor 王丽娜韩立林云生左燕生
Owner INST OF ELECTRICAL ENG CHINESE ACAD OF SCI
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Patsnap Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Patsnap Eureka Blog
Learn More
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic, Popular Technical Reports.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap|About US| Contact US: help@patsnap.com