Modularized scanning probe microscope

A technology of scanning probe and microscope, which is applied in the field of scanning probe microscope, can solve the problems of weak observation light, reducing the contrast of scanning image, unable to reduce the cost of the instrument, etc., and achieve the effect of reducing cost and high resonance frequency
CN1862308AInactive Publication Date: 2006-11-15SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Patent Information

Authority / Receiving Office
CN · China
Patent Type
Applications(China)
Current Assignee / Owner
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
Publication Date
2006-11-15
Estimated Expiration
Not applicable · inactive patent

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Abstract

The present invention relates to a modular scanning probe microscope combined with inverted fluorescence microscope. It is formed from five modules, in which the first module is inverted fluorescence microscope, second module is three-jaw approaching device, third module is scanning head, fourth module includes transparent sample table and X, Y and Z three-dimensional scanner and fifth module is laser microscopic extension module. Said invention also provides its working principle and concrete operation method.
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Description

technical field

[0001] The invention relates to a scanning probe microscope, in particular to a modular scanning probe microscope combined with a fluorescent inverted microscope. Background technique

[0002] Scanning probe microscope (hereinafter referred to as SPM) is a surface measurement instrument with ultra-high spatial resolution, which is easy to use and can be used for nanometer detection, manipulation and processing. Most of the existing scanning probe microscopes adopt a fixed structure, so they are only suitable for some specific applications, such as some are only suitable for small sample scanning, and some are only suitable for opaque sample detection. The combination of SPM, fluorescent inverted microscope and three-dimensional scanning sample stage can accurately locate the target to be scanned on the sample and the position of the needle tip. The method of scanning the needle tip of the sample can ensure the high coincidence of the needle tip and the illumi...

Claims

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