Light irradiation device

Abstract

The present invention provides a light irradiation device having a function of monitoring a decrease in illuminance due to deterioration of a light source, without complicating the mechanism and affecting productivity. A table (2) holding an object (W) on the upper side is moved in the X direction by a transport mechanism (3), and the workpiece (W) is irradiated with light when passing through an effective irradiation area. An illuminance meter is installed on the side (21) of the workbench (2), and moves integrally with the workbench (2) to pass through the effective irradiation area. The measured value of the illuminometer (6) is sent to the controller (7), and the light quantity calculation unit (71) included in the controller (7) calculates the light quantity and stores it in the storage unit (72).

Description

technical field [0001] The invention of the present application relates to a device for irradiating light toward an object. Background technique [0002] The industrial use of light is progressing in various fields, and light is irradiated to an object for various purposes. In particular, the technique of photoprocessing that changes the properties of an object by light is widely used in the manufacturing process of various products. [0003] For example, in recent years, in the manufacturing process of a liquid crystal display, the photoprocessing called photo-alignment is used more frequently. Photo-alignment is a technique in which an alignment film (a film to be an alignment layer) is obtained by irradiating light on a film material for an alignment layer when obtaining an alignment layer for a liquid crystal display or an alignment layer for a viewing angle compensation film. . [0004] In the field of such light processing, the following structure is sometimes adopt...

AI Technical Summary

Problems solved by technology

On the other hand, in Patent Document 1, the illuminance sensor is moved at the same speed as the workpiece, and in the case of processing with a large amount of irradiated light, the speed is slowed down, and the moving speed of the illuminance sensor is also slowed down.

In this case, the movement of the illuminance sensor (illuminance measurement) may not be completed even after the ejection of the workpiece is completed, which will affect the production interval time.

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