Angular velocity detection circuit, angular velocity detection device, electronic apparatus, and moving object
An angular velocity detection and angular velocity technology, which is applied in the testing/calibration of velocity/acceleration/shock measurement equipment, velocity/acceleration/shock measurement, navigation through velocity/acceleration measurement, etc., and can solve problems such as lowering
Inactive Publication Date: 2017-09-12
SEIKO EPSON CORP
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[0004] However, in the gyro sensor described in Patent Document 1, the output signal of the detection module part is one, and the angular velocity detection element for an angular velocity detection element that outputs a plurality of detection signals (for example, two detection signals in opposite phases to each other) A method for reducing the quadrature signals included in each of the plurality of detection signals is not disclosed in Patent Document 1
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[0063] Hereinafter, preferred embodiments of the present invention will be described in detail using the drawings. In addition, the embodiment described below does not unduly limit the content of the present invention described in the claims. In addition, not all of the configurations described below are essential components of the present invention.
[0064] 1. Angular velocity detection device
[0065] 1-1. First Embodiment
[0066] Structure and operation of angular velocity detection element
[0067] First, the angular velocity detection element 10 included in the angular velocity detection device 1 according to the present embodiment will be described with reference to the drawings. figure 1 It is a top view schematically showing the angular velocity detection element 10 . figure 2 It is a cross-sectional view schematically showing the angular velocity detection element 10 . In addition, in figure 1 In FIG. 3 , an X axis, a Y axis, and a Z axis are shown as three a...
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The invention provides an angular velocity detection circuit, an angular velocity detection device, an electronic apparatus, and a moving object. The angular velocity detection circuit includes: an angular velocity signal generation unit that generates an angular velocity signal on the basis of an output signal of a differential amplifier unit that differentially amplifies a signal based on an output signal of a first conversion unit and a signal based on an output signal of a second conversion unit; and a correction signal generation unit that generates a correction signal for reducing an offset of the angular velocity signal which occurs due to leakage signals which are respectively included in the first detection signal and the second detection signal on the basis of a signal based on drive oscillation of the angular velocity detection element. The correction signal is input to a circuit that is located on a first signal path ranging from the first detection electrode of an angular velocity detection element to the differential amplifier unit.
Description
technical field [0001] The invention relates to an angular velocity detection circuit, an angular velocity detection device, electronic equipment and a moving body. Background technique [0002] In recent years, an angular velocity sensor (gyro sensor) that detects an angular velocity using, for example, silicon MEMS (Micro Electro Mechanical System: Micro Electro Mechanical System) technology has been developed. [0003] Patent Document 1 discloses a technique for reducing the detection rate by inputting a quadrature error canceling signal to the previous stage of the detection circuit (between the detection module unit and the C / V conversion circuit) by capacitive coupling. A technique of quadrature signals included in the output signal of the module section. [0004] However, in the gyro sensor described in Patent Document 1, the output signal of the detection module part is one, and the angular velocity detection element for the angular velocity detection element that o...
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IPC IPC(8): G01C19/5776G01C21/18G01C19/5719
CPCG01C19/5719G01C19/5776G01C21/18G01C19/574G01C25/005G01P3/44G01P21/02
Inventor 金本啓
Owner SEIKO EPSON CORP