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A kind of image autofocus method and device

An automatic focus and image technology, applied in image analysis, image enhancement, image data processing, etc., can solve the problems of low focus sensitivity and long acquisition time

Active Publication Date: 2020-07-21
INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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  • Abstract
  • Description
  • Claims
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Problems solved by technology

[0005] The embodiment of the present application provides an image auto-focus method and device, which solves the technical problems of long scanning and acquisition time and low focus sensitivity of the existing image focus technology, and has the technical effect of enabling SEM to focus quickly and precisely

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  • A kind of image autofocus method and device
  • A kind of image autofocus method and device
  • A kind of image autofocus method and device

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Embodiment 1

[0024] figure 1 It is a flow chart of an image autofocus method provided by the embodiment of the present application.

[0025] The methods include:

[0026] Step 101: Obtain a first image, wherein the first image includes a background image and a noise image;

[0027] Specifically, the first image refers to an initial image scanned by a scanning electron microscope (SEM) when collecting images, and the initial image of the SEM includes image information to be acquired, background graphics and noise. The background image is a background graphic, and the noise image is noise in the first image. The background graphics and noise images will lead to longer focusing time when collecting images and reduce focusing sensitivity.

[0028] Step 102: Obtain a first target image according to the first image, wherein the first target image is an image obtained after filtering out the background image and the noise image from the first image;

[0029] Specifically, because the backgrou...

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Abstract

The invention relates to the field of the image acquisition technology, particularly to an automatic image focusing method and apparatus. The method comprises: a first image is obtained and a first target image is obtained based on the first image; a first salient region image is obtained according to the first target image; a minimum external rectangular region of the first salient region image is obtained; the minimum external rectangular region is determined to a focusing window region, wherein the focusing window region includes a second image; a second target image is obtained according to the second image and a focusing evaluation function value of the second target image is obtained based on a pixel gray scale value and an average pixel gray scale value; and a third target image is obtained based on the focusing evaluation function extreme value. Therefore, technical problems of long scanning and collection time and low focusing sensitivity of the existing image focusing technology can be solved. The automatic image focusing method and apparatus have a technical effect of rapid and precise SEM focusing.

Description

technical field [0001] The invention relates to the technical field of image acquisition, in particular to an image auto-focus method and device. Background technique [0002] As the feature size of large-scale integrated circuits becomes smaller and smaller, a scanning electron microscope (Scanning Electron Microscope, referred to as SEM) plays an increasingly important role in large-scale integrated circuit inspection equipment. When the SEM is working, many factors will cause the focus state of the system to change, thereby reducing the quality of the SEM image. In order to improve the working efficiency of SEM and obtain clear SEM images quickly, the scanning electron microscope needs to have a fast and precise autofocus function. SEM equipment is scanning imaging, the longer the scanning time, the more electrons each pixel receives, the higher the signal-to-noise ratio of the image, but the longer the corresponding image acquisition time. [0003] Those skilled in the...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G06T7/33G06T5/00G02B21/36
CPCG02B21/365G06T5/002G06T7/33
Inventor 韩邦强宗明成孟璐璐
Owner INST OF MICROELECTRONICS CHINESE ACAD OF SCI
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