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A glass substrate position correction device and method

A technology of glass substrates and substrates, which is applied in the direction of transportation and packaging, electrical components, conveyor objects, etc., can solve problems such as glass substrate breaking, achieve convenient operation, reduce production loss and economic loss, and improve the effect of abutment fragments

Active Publication Date: 2019-11-05
WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

[0004] The purpose of the present invention is to overcome the defect that the glass substrate is shifted and then broken due to the precision of the manipulator when the glass substrate enters the vacuum atmosphere exchange chamber, and to invent a device capable of correcting the position of the glass substrate to prevent the deviation of the glass substrate. Move too large to cause fragments

Method used

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  • A glass substrate position correction device and method
  • A glass substrate position correction device and method
  • A glass substrate position correction device and method

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Embodiment Construction

[0032] The present invention will be further described below in conjunction with accompanying drawing.

[0033] Such as figure 1 with figure 2 As shown, it is a schematic diagram of the three-dimensional structure of the glass substrate position correction device of the present invention, including:

[0034] A pair of limit columns 1 for adjusting the position of the glass substrate; a carrier platform 2, the pair of limit columns fixed on the carrier platform 2; a support platform 3, arranged at one end of the carrier platform 2 without a limit column , used to support the bearing platform. The center of the support platform 3 is provided with a fixing rod 6 penetrating the bearing platform 2 for fixing the bearing platform 2 on the support platform 3 , and the fixing rod 6 is covered with an anti-loosening gasket. Described anti-off gasket comprises the first anti-off gasket 4 and the second anti-off gasket 5, and described first anti-off gasket 4, carrier platform 2 and...

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Abstract

The invention provides a glass substrate position correcting device and a method thereof. The glass substrate position correcting device is arranged at a corner of a glass substrate for correcting position of the glass substrate. The device comprises the components of a pair of spacing columns which is used for adjusting the position of the glass substrate; a bearing platform on which the pair of spacing columns is fixed; a supporting platform which is arranged at one end of the bearing platform for supporting the bearing platform, wherein the end of the bearing platform is far from the spacing columns; a connecting rod which is fixedly connected with the supporting platform; and a control device which is connected with the connecting rod for controlling movement of the connecting rod. The glass substrate position correcting device and the method thereof prevents substrate damage caused by overlarge glass substrate offset and furthermore reduce energy loss and economic loss.

Description

technical field [0001] The invention relates to a device and method for correcting the position of a glass substrate during ion implantation in a low-temperature polysilicon manufacturing process. Background technique [0002] At present, ion implantation (IMP, Ion Implantation) is used more and more in the low temperature polysilicon (LTPS, Low Temperature Poly-silicon) process. The ion implanter is used to screen specific ions implanted into the glass substrate. The device structure consists of a vacuum atmosphere exchange chamber , Vacuum transfer chamber, fabrication chamber, ion generation chamber and magnetic field filter and other units. During the ion implantation process of glass, the glass substrate passes through the vacuum atmosphere exchange chamber, the vacuum transfer chamber and the manufacturing chamber in sequence. When exiting, the glass substrate is transferred from the manufacturing chamber to the vacuum transfer chamber and then to the vacuum atmosphere...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): H01L21/677H01L21/68H01L21/687
CPCH01L21/67706H01L21/68H01L21/68785
Inventor 王玉添
Owner WUHAN CHINA STAR OPTOELECTRONICS TECH CO LTD