Unlock instant, AI-driven research and patent intelligence for your innovation.

MEMS three-axis gyroscope

A technology of gyroscope and mass block, applied in the field of inertia, can solve the problems of signal crosstalk between axes of MEMS three-axis gyroscope, and achieve the effect of reducing signal crosstalk between axes and reducing motion interference

Active Publication Date: 2017-09-22
SENODIA TECH (SHANGHAI) CO LTD
View PDF16 Cites 7 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the driving structure of the MEMS three-axis gyroscope with the above structure drives the mass blocks corresponding to the X, Y, and Z axes, there is motion interference between the mass blocks of each axis, which causes the axis of the MEMS three-axis gyroscope inter-signal crosstalk

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • MEMS three-axis gyroscope
  • MEMS three-axis gyroscope
  • MEMS three-axis gyroscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] refer to figure 1 , in this embodiment, the MEMS three-axis gyroscope includes a central anchor point 100, a first sub-mass 200, a first decoupling structure 300, a second sub-mass 400, a second decoupling structure 500 and a third sub-mass The mass 600, the third sub-mass 600 includes two molecular masses arranged symmetrically in the first direction x, and the two molecular masses are suspended on the second decoupling structure 500 through the fifth spring 5a.

[0057] The first sub-mass 200 is connected to the central anchor point 100 through the first spring 1, the first sub-mass 200 is connected to the first decoupling structure 300 around it through the second spring 2, and the first decoupling structure 300 is connected to the first decoupling structure 300 through the second spring 2. The three springs 3 are connected to the second sub-mass 400 , the second sub-mass 400 is connected to the second decoupling structure 500 through the fourth spring 4 , and the seco...

Embodiment 2

[0066] see figure 2 , in this embodiment, the MEMS three-axis gyroscope includes a central anchor point 100, a first sub-mass 200, a first decoupling structure 300, a second sub-mass 400, a second decoupling structure 500 and a third sub-mass The mass 600, the third sub-mass 600 includes two molecular masses arranged symmetrically in the second direction y, and the two molecular masses are suspended on the second decoupling structure 500 through the fifth spring 5b.

[0067] The first sub-mass 200 is connected to the central anchor point 100 through the first spring 1, the first sub-mass 200 is connected to the first decoupling structure 300 around it through the second spring 2, and the first decoupling structure 300 is connected to the first decoupling structure 300 through the second spring 2. The three springs 3 are connected to the second sub-mass 400, the second sub-mass 400 is connected to the second decoupling structure 500 through the fourth spring 4, and the second ...

Embodiment 3

[0076] refer to image 3 , in this embodiment, the MEMS three-axis gyroscope includes a central anchor point 100, a first sub-mass 200, a first decoupling structure 300, a second sub-mass 400, a second decoupling structure 500 and a third sub-mass The quality block 600, the third sub-mass block 600 includes two molecular mass blocks arranged symmetrically in the first direction x and two molecular mass blocks arranged symmetrically in the second direction y, the four molecular mass blocks are suspended by the fifth spring On the second decoupling structure 500 , the four molecular masses are coupled to each other through the sixth spring 6 .

[0077] The first sub-mass 200 is connected to the central anchor point 100 through the first spring 1, the first sub-mass 200 is connected to the first decoupling structure 300 around it through the second spring 2, and the first decoupling structure 300 is connected to the first decoupling structure 300 through the second spring 2. The...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

PUM

No PUM Login to View More

Abstract

The embodiment of the invention discloses an MEMS three-axis gyroscope. The MEMS three-axis gyroscope comprises central anchor points arranged from inside to outside in sequence, a first subsidiary mass block, a first decoupling structure, a second subsidiary mass block and a third subsidiary mass block. When the first subsidiary mass block resonates under a driving pattern around the third direction, the motion direction of the first subsidiary mass block is similar to the first direction. When the first subsidiary mass block is under the angular velocity around the second direction, the first subsidiary mass block generates Coriolis force in the third direction and generates displacement around the first direction under the effect of the Coriolis force. The axis of the first decoupling structure is also in the first direction, and accordingly a fairly small part of force of the first subsidiary mass block in the detection mode of the first direction is transmitted to the first decoupling structure, and the force transmitted to the second subsidiary mass block by the first decoupling structure is quite small, so that motion interference between the first subsidiary mass block and the second subsidiary mass block is reduced, and thus inter-axial signal crosstalk of the MEMS three-axis gyroscope is reduced.

Description

technical field [0001] The invention relates to the technical field of inertia, and more specifically, relates to a MEMS three-axis gyroscope. Background technique [0002] The MEMS (Micro Electro Mechanical System, Micro Electro Mechanical System) three-axis gyroscope includes a driving part and a detecting part, and the measurement of the angular velocity of the motion is realized through the coupling of the driving part and the detecting part; the gyroscope is in the driving mode, when in the driving mode When there is an angular velocity input in the direction perpendicular to the motion axis, the gyroscope generates a motion of the detection mode in the detection axis due to the Coriolis effect, and the detection of the angular velocity is realized by measuring the displacement of the detection mode. [0003] The traditional MEMS three-axis gyroscope mechanical structure is composed of three independent X, Y, and Z single-axis gyroscopes. Each single-axis gyroscope mech...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to View More

Application Information

Patent Timeline
no application Login to View More
Patent Type & Authority Applications(China)
IPC IPC(8): G01C19/5656G01C19/5663
CPCG01C19/5656G01C19/5663G01C19/5712
Inventor 邹波郭梅寒
Owner SENODIA TECH (SHANGHAI) CO LTD