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A mems three-axis gyroscope

A technology of gyroscopes and mass blocks, applied in the inertial field, can solve problems such as inter-axis signal crosstalk of MEMS three-axis gyroscopes, and achieve the effect of reducing inter-axis signal crosstalk and reducing motion interference

Active Publication Date: 2022-04-05
SENODIA TECH (SHANGHAI) CO LTD
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

However, when the driving structure of the MEMS three-axis gyroscope with the above structure drives the mass blocks corresponding to the X, Y, and Z axes, there is motion interference between the mass blocks of each axis, which causes the axis of the MEMS three-axis gyroscope inter-signal crosstalk

Method used

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  • A mems three-axis gyroscope

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0056] refer to figure 1 , in this embodiment, the MEMS three-axis gyroscope includes a central anchor point 100, a first sub-mass 200, a first decoupling structure 300, a second sub-mass 400, a second decoupling structure 500 and a third sub-mass The mass 600, the third sub-mass 600 includes two molecular masses arranged symmetrically in the first direction x, and the two molecular masses are suspended on the second decoupling structure 500 through the fifth spring 5a.

[0057] The first sub-mass 200 is connected to the central anchor point 100 through the first spring 1, the first sub-mass 200 is connected to the first decoupling structure 300 around it through the second spring 2, and the first decoupling structure 300 is connected to the first decoupling structure 300 through the second spring 2. The three springs 3 are connected to the second sub-mass 400 , the second sub-mass 400 is connected to the second decoupling structure 500 through the fourth spring 4 , and the seco...

Embodiment 2

[0066] see figure 2 , in this embodiment, the MEMS three-axis gyroscope includes a central anchor point 100, a first sub-mass 200, a first decoupling structure 300, a second sub-mass 400, a second decoupling structure 500 and a third sub-mass The mass 600, the third sub-mass 600 includes two molecular masses arranged symmetrically in the second direction y, and the two molecular masses are suspended on the second decoupling structure 500 through the fifth spring 5b.

[0067] The first sub-mass 200 is connected to the central anchor point 100 through the first spring 1, the first sub-mass 200 is connected to the first decoupling structure 300 around it through the second spring 2, and the first decoupling structure 300 is connected to the first decoupling structure 300 through the second spring 2. The three springs 3 are connected to the second sub-mass 400, the second sub-mass 400 is connected to the second decoupling structure 500 through the fourth spring 4, and the second ...

Embodiment 3

[0076] refer to image 3 , in this embodiment, the MEMS three-axis gyroscope includes a central anchor point 100, a first sub-mass 200, a first decoupling structure 300, a second sub-mass 400, a second decoupling structure 500 and a third sub-mass The quality block 600, the third sub-mass block 600 includes two molecular mass blocks arranged symmetrically in the first direction x and two molecular mass blocks arranged symmetrically in the second direction y, the four molecular mass blocks are suspended by the fifth spring On the second decoupling structure 500 , the four molecular masses are coupled to each other through the sixth spring 6 .

[0077] The first sub-mass 200 is connected to the central anchor point 100 through the first spring 1, the first sub-mass 200 is connected to the first decoupling structure 300 around it through the second spring 2, and the first decoupling structure 300 is connected to the first decoupling structure 300 through the second spring 2. The...

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Abstract

The embodiment of the present invention discloses a MEMS three-axis gyroscope, which includes a central anchor point, a first sub-mass block, a first decoupling structure, a second sub-mass block and a third sub-mass block arranged sequentially from inside to outside. When the first sub-mass resonates in the driving mode around the third direction, its motion direction is similar to moving along the first direction. When the first sub-mass is subjected to an angular velocity around the second direction, it will generate Coriolis force in three directions, under the action of Coriolis force, the first sub-mass will produce a displacement around the first direction, since the axis of the first decoupling structure is also in the first direction, therefore, the first sub-mass is in In the detection mode of the first direction, only a small part of the force is transmitted to the first decoupling structure, and the force transmitted to the second sub-mass by the first decoupling structure will also be very small, reducing the first sub-mass and the motion interference between the second sub-mass block, thereby reducing the inter-axis signal crosstalk of the MEMS three-axis gyroscope.

Description

technical field [0001] The invention relates to the technical field of inertia, and more specifically, relates to a MEMS three-axis gyroscope. Background technique [0002] The MEMS (Micro Electro Mechanical System, Micro Electro Mechanical System) three-axis gyroscope includes a driving part and a detecting part, and the measurement of the angular velocity of the motion is realized through the coupling of the driving part and the detecting part; the gyroscope is in the driving mode, when it is in the driving mode When there is an angular velocity input in the direction perpendicular to the dynamic motion axis, the gyroscope generates a motion of the detection mode in the detection axis due to the Coriolis effect, and the detection of the angular velocity is realized by measuring the displacement of the detection mode. [0003] The traditional MEMS three-axis gyroscope mechanical structure is composed of three independent X, Y, Z single-axis gyroscopes. Each single-axis gyro...

Claims

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Application Information

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Patent Type & Authority Patents(China)
IPC IPC(8): G01C19/5656G01C19/5663
CPCG01C19/5656G01C19/5663G01C19/5712
Inventor 邹波郭梅寒
Owner SENODIA TECH (SHANGHAI) CO LTD