Mask device for repairing negative electrode ring and application method of mask device

Abstract

The invention discloses a mask device for repairing a negative electrode ring and an application method of the mask device. The mask device comprises a mask, wherein mask comprises a display region shading part, a hollow part and reinforcement ribs, and the hollow part is connected to the periphery of the display region shading part via the reinforcement ribs. The mask device is used for shading and protecting during repairing the negative electrode ring, a repair material of the negative electrode ring is prevented from entering the device display region to affect photoelectric properties such as device brightness and display uniformity, the dark spot defect caused by fabrication of a metal oxide transparent conducive protection layer due to the adoption of a sputtering method is prevented, so that the protection of the negative electrode ring can be achieved by employing various physical vapor deposition (PVD) processes such as sputtering and evaporation, and the light output and the process compatibility of the device are ensured to the greatest extent.

Description

technical field [0001] The invention relates to a mask device for repairing cathode rings, in particular to a mask device suitable for repairing cathode rings of OLED microdisplays and a method for using the same. Background technique [0002] In the production and preparation process of OLED microdisplays, a top-emitting light-emitting device structure is generally used, and its anode usually adopts a thick metal layer to ensure high reflectivity. preparation, while the cathode is prepared with a very thin layer of thermal evaporation to ensure the light output A translucent metal layer is achieved. Due to the large difference in thickness, it often leads to breakage and poor contact between the edge step of the anode metal layer and the semi-transparent cathode layer, which causes the device driving voltage to increase or open circuit failure. However, simply thickening the metal cathode layer will lead to a significant decrease in the light output of the device. [0...

AI Technical Summary

Problems solved by technology

Due to the large difference in thickness, it often leads to breakage and poor contact when the edge step of the anode metal layer contacts the semi-transparent cathode layer, which causes the device drive voltage to increase or open circuit failure

However, simply thickening the metal cathode layer will lead to a significant decrease in the light output of the device.

[0003] At present, adding a layer of transparent conductive layer (ITO) on the cathode layer by sputtering can solve the problem of cathode fracture, but the sputtering method itself will generate a large number of high-speed particles impacting the surface of the device, causing black spot defects, and greatly reducing the yield

However, all transparent conductive films currently used are prepared by sputtering due to their high evaporation temperature, which cannot solve the problem of black spot defects.

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