Piezoelectric vibration device
A piezoelectric vibration and device technology, applied in electrical components, piezoelectric/electrostrictive/magnetostrictive devices, piezoelectric/electrostrictive devices manufacturing/assembly, etc., can solve the variable frequency of piezoelectric vibration devices Smaller, etc.
Active Publication Date: 2018-01-02
DAISHINKU CORP
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- Abstract
- Description
- Claims
- Application Information
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Problems solved by technology
In this case, since the parasitic capacitance (stray capacitance) caused by the connection between the excitation electrode and the sealing part is generated, there is a possibility that the frequency variability of the piezoelectric vibration device becomes small
Method used
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Embodiment Construction
[0075] Hereinafter, embodiments of the present invention will be described with reference to the drawings. In addition, in the following embodiments, a case where the present invention is applied to a crystal resonator as a piezoelectric vibration device that performs piezoelectric vibration will be described.
[0076]
[0077] Such as figure 1 As shown, the crystal resonator 101 involved in this embodiment is provided with a crystal vibrating plate 2 (the piezoelectric vibrating plate referred to in the present invention), a first sealing member 3, and a second sealing member 4, wherein the first sealing member Part 3 covers the first excitation electrode 221 of the crystal vibrating piece 2 (refer to Figure 4 ), and the first exciting electrode 221 formed on one main surface 211 of the crystal vibrating piece 2 is hermetically sealed; The second excitation electrode 222 (refer to Figure 5 ) and hermetically seals the second excitation electrode 222 formed as a pair wi...
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[Problem] To improve reliability while also ensuring airtightness of an interior space where a vibration section of a piezoelectric diaphragm is sealed off, in a piezoelectric vibration device of a sandwich structure. [Solution] Provided to a crystal oscillator 101 are a crystal diaphragm 2, a first sealing member 3 covering a first excitation electrode 221 of the crystal diaphragm 2, and a secondsealing member 4 covering a second excitation electrode 222 of the crystal diaphragm 2. A third through hole 269 penetrating through one main surface 211 and another main surface 212 is formed in thecrystal diaphragm 2, and a through electrode 71 of the third through hole 269 is electrically conductive with the first excitation electrode 221. A seventh through hole 350 penetrating between one main surface 311 and another main surface 312 is formed in the first sealing member 3. The through electrode 71 of the third through hole 269 and the through electrode 71 of the seventh through hole 350are electrically conductive with each other, and the third through hole 269 and the seventh through hole 350 are arranged so as not to overlap as seen in plan view.
Description
technical field [0001] The invention relates to a piezoelectric vibration device. Background technique [0002] In recent years, various electronic devices are developing toward higher operating frequencies and miniaturization (especially lower profile) of packages. Accordingly, piezoelectric vibration devices (for example, crystal resonators) are required to respond to higher frequency and smaller packages in accordance with higher frequencies and smaller packages. [0003] In such a piezoelectric vibration device, the casing thereof is constituted by a rectangular parallelepiped package. The package includes a first sealing member and a second sealing member made of glass or quartz crystal; and a crystal oscillator made of quartz crystal and having excitation electrodes formed on two main surfaces. The first sealing material and the second sealing material are bonded via the laminated crystal oscillator, and the excitation electrodes of the crystal oscillator placed insi...
Claims
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IPC IPC(8): H03H9/02H10N30/02H10N30/076
CPCH03H9/0547H03H9/0595H03H9/1035H03H9/131H03H9/17H03H9/19H03H2003/022H01L23/08H03H3/02H03H9/02H10N30/02H10N30/076H03H3/04H03H9/02125H03H9/0523H03H9/10H03H9/132H03H2003/0442
Inventor 古城琢也石野悟
Owner DAISHINKU CORP