System and method for automatically measuring property of vapor stream vacuum pump

Abstract

The invention relates to a system and a method for automatically measuring the property of a vapor stream vacuum pump, which belong to the technical field of vacuum test. The invention can be in strict accordance with the test principle and the method specified in national and international standards to automatically complete the test of parameters of the vapor stream vacuum pump. The system comprises a test cover, a gas flow testing unit, a fore pipe gas flow adjusting unit, and the like, wherein the gas flow testing unit comprises a dropper, a dropper magnetic valve is arranged at a gas inlet of the upper part of the dropper, and the outer side of the dropper is provided with an upper liquid level switch and a lower liquid level switch; a test cover gas flow adjusting unit and the fore pipe gas flow adjusting unit both comprise stepping motors, needle type micrometering valves and high-vacuum magnetic valves, drive buttons of the needle type micrometering valves are connected with the stepping motors, and gas outlets of the needle type micrometering valves are connected with the high-vacuum magnetic valves; and the liquid level switches, the dropper magnetic valve, and the like are connected with a computer control unit. The measuring method comprises the following steps of measurement of limit pressure of the vapor stream vacuum pump, measurement of volume flow rate, and measurement of critical fore pressure.

Description

Technical field: [0001] The invention belongs to the technical field of vacuum testing, in particular to an automatic performance measurement system and a measurement method of a vapor flow vacuum pump. Background technique: [0002] Vapor flow vacuum pumps, including oil diffusion pumps, oil jet pumps and oil booster pumps, are a type of vacuum pumping equipment that are widely used. It is widely used in machinery, electronics, metallurgy, nuclear energy, space simulation and other industrial fields and scientific and technological research, and plays an important role in the development of modern science and technology and the construction of the national economy. The three performance indicators of the steam flow vacuum pump, the ultimate pressure, the pumping rate and the critical front pressure, can comprehensively and specifically reflect the pumping performance of the pump; therefore, relevant national and international standards (steam flow vacuum pump performance M...

AI Technical Summary

Problems solved by technology

The main reasons are: the existing domestic related detection systems are all manually operated, which requires high professional knowledge and experimental skills for operators, and requires special training to complete the product performance detection of steam flow vacuum pumps; and, The accuracy of the measurement data is affected by many human factors, which make it difficult for the manufacturer to independently carry out the performance measurement of the vapor flow vacuum pump

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