A three-axis capacitive accelerometer
An accelerometer and capacitive technology, which is applied in the field of sensors, can solve the unfavorable trend of three-axis capacitive accelerometers becoming thinner and thinner, and the problems of mass blocks occupying an area and a large weight
Active Publication Date: 2022-02-22
SENODIA TECH (SHANGHAI) CO LTD
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However, the existing three-axis capacitive accelerometers generally include a plurality of mass blocks to correspond to the detection areas of different axes respectively, and the occupied area and weight of the mass blocks are large, which is not conducive to the three-axis capacitive accelerometer. thinning trend
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[0044] The following will clearly and completely describe the technical solutions in the embodiments of the present invention with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only some, not all, embodiments of the present invention. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts belong to the protection scope of the present invention.
[0045] As mentioned in the background technology, the existing three-axis capacitive accelerometer generally includes a plurality of mass blocks to correspond to the detection areas of different axes respectively, and the occupied area and weight of the mass blocks are large, which is not conducive to the three-axis Thinning trend of capacitive accelerometer.
[0046] Based on this, the embodiment of the present application provides a three-axis capacitive acc...
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The invention discloses a three-axis capacitive accelerometer, which can judge the direction of the acceleration in the i-axis direction through the positions of the first type of detection area and the second type of detection area; because all the i-axis capacitance detection electrodes of the first type of detection area The total amount of change of the capacitance value according to the input of the acceleration of the mass block along the m-axis or n-axis, and the capacitance value of the i-axis capacitance detection electrodes of all the second-type detection areas according to the mass block along the m-axis or n-axis The total amount of change due to the input of acceleration is the same, and the sum of the capacitance values of the i-axis capacitance detection electrodes in all the first type of detection areas is different from the sum of the capacitance values of the i-axis capacitance detection electrodes in all the second type of detection areas value to eliminate the influence of the acceleration input of the mass block along the m-axis or n-axis on the acceleration in the i-axis direction. By deriving the difference, the acceleration in the i-axis direction can be obtained. Sharing a mass block is beneficial to the three axes Thinning trend of capacitive accelerometer.
Description
technical field [0001] The invention relates to the technical field of sensors, and more specifically, relates to a three-axis capacitive accelerometer. Background technique [0002] Micro-accelerometers based on micro-electro-mechanical systems (MEMS, Micro-Electro-Mechanical-System) have been widely used in industry, medical, civilian, military, etc. due to their small size, low cost, good integration, and excellent performance. fields have been increasingly applied. At present, in the application of various mobile terminals, cameras, game controllers, navigators and other products, to a certain extent, it has become a standard configuration. In the development process, capacitive, resistive, and piezoelectric methods are the main application mechanisms for detecting acceleration. Among them, capacitive accelerometers are simple in structure, low in cost, and have high sensitivity in the low frequency range. And linearity and other advantages, become the most popular typ...
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IPC IPC(8): G01P15/125G01P15/18
CPCG01P15/125G01P15/18
Inventor 邹波郑青龙付世
Owner SENODIA TECH (SHANGHAI) CO LTD