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Mask bearing device and evaporation device

A technology for carrying device and mask plate, which is applied in vacuum evaporation coating, sputtering coating, ion implantation coating and other directions, can solve the problems of inaccurate placement of mask plate, reduced production capacity, and reduced working efficiency of the preparation process, etc. , to achieve the effect of increasing production capacity, avoiding secondary adjustment, and improving work efficiency

Active Publication Date: 2018-03-16
BOE TECH GRP CO LTD +1
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

In the current production process, the mask plate on the carrier is picked and placed by a manual cart, but due to the uncertainty of the direction of the process of artificially pushing the manual cart, it often happens that the mask plate cannot be placed accurately in the determined slot of the carrier frame Within the position, a secondary adjustment is required, which leads to problems such as reduced work efficiency and reduced production capacity in the preparation process.

Method used

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  • Mask bearing device and evaporation device
  • Mask bearing device and evaporation device
  • Mask bearing device and evaporation device

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Embodiment Construction

[0039] The technical solutions in the embodiments of the present invention will be clearly and completely described below in conjunction with the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative work shall fall within the protection scope of the present invention.

[0040] In this embodiment, for ease of description, according to the placement position of the device during operation, the direction along the extension direction of the free end of the base stop in the mask carrying device in this embodiment is the vertical direction, and the base stop is free The direction the end faces is upward, and the direction perpendicular to the vertical direction is the horizontal direction; the mask conveying ...

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PUM

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Abstract

The invention relates to the technical field of production equipment for display devices and discloses a mask bearing device and an evaporation device. The mask bearing device comprises a bearing frame. The bearing frame comprises two parallel support plates. A walking gap is formed between the two support plates. Multiple foundation stop dogs higher than the support face are arranged on each support plate. A first stop dog is formed on the portion, corresponding to the second end of the walking gap, in each support plate. A first end facing the walking gap and a mask posture correction face in the direction perpendicular to the extending direction of the walking gap are formed in each stop dog, and in the direction perpendicular to the support face, the heights of the posture correction faces are higher than that of the foundation stop dogs. According to the mask bearing device, the postures of masks on a mask conveying trolley are adjusted by the first stop dogs so that the masks canbe precisely put on the bearing frame, secondary adjustment of the mask positions is avoided, the working efficiency is improved effectively, and the productivity can be improved.

Description

Technical field [0001] The present invention relates to the technical field of manufacturing equipment for display devices, in particular to a mask plate carrying device and an evaporation device. Background technique [0002] The high-precision metal mask mode is now a common way to prepare display devices. The organic electroluminescent material is vapor-deposited on the backplane according to a predetermined procedure by vapor deposition, and red, green, and blue are vapor-deposited using the patterns on the mask. Organic matter to the specified location. In the current production process, the mask on the carrier is picked up and placed by a manual car. However, due to the uncertainty of the process direction of the manual car, it often happens that the mask cannot be accurately placed in the definite slot of the carrier. In the position, secondary adjustments are also required, which causes problems such as reduced work efficiency of the preparation process and reduced produ...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): C23C14/04C23C14/24
CPCC23C14/042C23C14/24
Inventor 林治明黄俊杰王琦尹志白音必力郝志元辛小林王震刘旭
Owner BOE TECH GRP CO LTD
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