A kind of preparation method of solid-state fluorescent carbon quantum dots
A technology of carbon quantum dots and solid-state fluorescence, applied in gaseous chemical plating, metal material coating process, coating, etc., can solve the problems of unfavorable transportation and preservation, difficult control of preparation process, etc.
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Embodiment 1
[0011] A kind of preparation method that is embedded with carbon quantum dot film material comprises the following steps:
[0012] (1) Clean and dry the substrate. First place the quartz sheet or monocrystalline silicon wafer in acetone for 10 minutes of ultrasonic cleaning, then use deionized water to ultrasonically rinse the quartz sheet or monocrystalline silicon wafer for 5 minutes, and then place it in absolute ethanol for 10 minutes of ultrasonic cleaning, and then Use deionized water to ultrasonically rinse the quartz wafer or single crystal silicon wafer for 5 minutes, and finally dry it with nitrogen;
[0013] (2) The reaction chamber is pre-evacuated to remove residual gas. Use mechanical pumps, Roots pumps, molecular pumps and other vacuum equipment to pre-evacuate the reaction chamber at 200 ° C until the pressure is lower than 10 -4 Pa;
[0014] (3) Preparation of thin films embedded with carbon quantum dots. Using methane as the reaction gas, plasma-enhanced...
Embodiment 2
[0018] A kind of preparation method that is embedded with carbon quantum dot film material comprises the following steps:
[0019] (1) Clean and dry the substrate. First place the quartz sheet or monocrystalline silicon wafer in acetone for 10 minutes of ultrasonic cleaning, then use deionized water to ultrasonically rinse the quartz sheet or monocrystalline silicon wafer for 5 minutes, and then place it in absolute ethanol for 10 minutes of ultrasonic cleaning, and then Use deionized water to ultrasonically rinse the quartz wafer or single crystal silicon wafer for 5 minutes, and finally dry it with nitrogen;
[0020] (2) The reaction chamber is pre-evacuated to remove residual gas. Use mechanical pumps, Roots pumps, molecular pumps and other vacuum equipment to pre-evacuate the reaction chamber at 220 ° C until the pressure is lower than 10 -4 Pa.
[0021] (3) Preparation of thin films embedded with carbon quantum dots. Using methane as the reaction gas, plasma-enhanced...
Embodiment 3
[0024] A kind of preparation method that is embedded with carbon quantum dot film material comprises the following steps:
[0025] (1) Clean and dry the substrate. First place the quartz sheet or monocrystalline silicon wafer in acetone for 10 minutes of ultrasonic cleaning, then use deionized water to ultrasonically rinse the quartz sheet or monocrystalline silicon wafer for 5 minutes, and then place it in absolute ethanol for 10 minutes of ultrasonic cleaning, and then Use deionized water to ultrasonically rinse the quartz wafer or single crystal silicon wafer for 5 minutes, and finally dry it with nitrogen;
[0026] (2) The reaction chamber is pre-evacuated to remove residual gas. Use mechanical pumps, Roots pumps, molecular pumps and other vacuum equipment to pre-evacuate the reaction chamber at 240 °C until the pressure is lower than 10-4 Pa.
[0027] (3) Preparation of thin films embedded with carbon quantum dots. Using methane as the reaction gas, plasma-enhanced che...
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