Adjustable ultrahigh acceleration macron-micro motion platform

A technology of micro-motion and acceleration, applied in the direction of metal processing equipment, metal processing machinery parts, large fixed members, etc., can solve the problem of inconvenient adjustment of the total force, and achieve the effect of ensuring accuracy

Active Publication Date: 2018-05-01
HENAN UNIVERSITY OF TECHNOLOGY
View PDF7 Cites 2 Cited by
  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

AI Technical Summary

Problems solved by technology

At present, the ultra-high-speed macro-micro motion platform increases the acceleration and force by increasing the stroke of the platform motion. The force generated by the motion platform has a great relationship with the stroke of the platform motion, and the total It is inconven

Method used

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
View more

Image

Smart Image Click on the blue labels to locate them in the text.
Viewing Examples
Smart Image
  • Adjustable ultrahigh acceleration macron-micro motion platform
  • Adjustable ultrahigh acceleration macron-micro motion platform
  • Adjustable ultrahigh acceleration macron-micro motion platform

Examples

Experimental program
Comparison scheme
Effect test

Embodiment 1

[0028] Example 1, such as Figure 1-Figure 12 As shown in the structure,

[0029] An adjustable ultra-high acceleration macro-micro motion platform, comprising a base 1, a macro-micro motion platform 2 arranged on the base 1, the left and right sides of the macro-micro motion platform 2 are respectively provided with linear motor units 3, the macro-micro motion The linear motor units 3 on the left and right sides of the platform 2 have the same structure, and the linear motor units 3 on one side of the macro-micro motion platform 2 include three linear motors 4, the linear motors 4 are voice coil motors, and the linear motors 4 pass through The arm bars 5 are connected, and each linear motor 4 is provided with a vibration-damping platform below, and the bottom of the vibration-damping platform is connected with the base 1. The vibration-damping platform includes a lower base 6, an upper base 7 and a vibration-damping platform. Module 8, the lower base 6 is fixed on the base 1...

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

PUM

No PUM Login to view more

Abstract

The invention belongs to the technical field of microelectronic manufacturing equipment motion platforms, and particularly relates to an adjustable ultrahigh acceleration macron-micro motion platform.The adjustable ultrahigh acceleration macron-micro motion platform comprises a base and a macron-micro motion platform body arranged on the base. The left side and the right side of the macron-micromotion platform body are connected with linear motor sets correspondingly. The linear motor sets are arranged on damping platforms. The lower portions of the damping platforms are connected with the base. Each damping platform comprises a lower base, an upper base and a damping module, wherein the lower base is fixed to the base, a sliding pair is arranged between the upper base and the lower base, and the damping module is arranged between the lower base and the upper base. According to the device, ultrahigh force and ultrahigh acceleration can be generated, and provided force and provided acceleration can be adjusted according to needs.

Description

technical field [0001] The invention belongs to the technical field of microelectronics manufacturing equipment, and in particular relates to an adjustable ultra-high acceleration macro and micro motion platform. Background technique [0002] With the rapid development of the microelectronics industry, the role of precision positioning platforms with ultra-high force, high acceleration, and easy force adjustment has emerged as a key device, especially in the field of microelectronics manufacturing such as wire bonding and photolithography, motion platforms are more needed Complete ultra-high-force, high-acceleration ultra-precise positioning movement. At present, the ultra-high-speed macro-micro motion platform increases the acceleration and force by increasing the stroke of the platform motion. The force generated by the motion platform has a great relationship with the stroke of the platform motion, and the total It is inconvenient to adjust the strength. Finally, when th...

Claims

the structure of the environmentally friendly knitted fabric provided by the present invention; figure 2 Flow chart of the yarn wrapping machine for environmentally friendly knitted fabrics and storage devices; image 3 Is the parameter map of the yarn covering machine
Login to view more

Application Information

Patent Timeline
no application Login to view more
IPC IPC(8): B23Q1/25B23Q5/28B23Q11/00
CPCB23Q1/25B23Q5/28B23Q11/00B23Q11/0032
Inventor 张璐凡田海龙李勤良冯伟陈晨杨丽彦李雪丽
Owner HENAN UNIVERSITY OF TECHNOLOGY
Who we serve
  • R&D Engineer
  • R&D Manager
  • IP Professional
Why Eureka
  • Industry Leading Data Capabilities
  • Powerful AI technology
  • Patent DNA Extraction
Social media
Try Eureka
PatSnap group products

Browse by: Latest US Patents, China's latest patents, Technical Efficacy Thesaurus, Application Domain, Technology Topic.

© 2024 PatSnap. All rights reserved.Legal|Privacy policy|Modern Slavery Act Transparency Statement|Sitemap