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Machining method of equal-thickness off-axis aspheric reflector

An off-axis aspheric surface and processing method technology, which is applied to the processing field of thick off-axis aspheric mirrors, can solve the problems of low processing precision and a large amount of force, and achieves low processing cost, high precision, accurate positioning and high precision. The effect of equal thickness machining

Active Publication Date: 2018-05-04
SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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Problems solved by technology

The bending stress polishing method is easy to maintain the focal length and off-axis amount of the off-axis aspheric surface, but it requires a large number of mechanical parts for force, which is suitable for rough machining of large quantities of off-axis aspheric surfaces, and the machining accuracy is not high

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  • Machining method of equal-thickness off-axis aspheric reflector
  • Machining method of equal-thickness off-axis aspheric reflector
  • Machining method of equal-thickness off-axis aspheric reflector

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Embodiment Construction

[0029] The present invention will be further described below with reference to the accompanying drawings and examples, but the protection scope of the present invention should not be limited thereto.

[0030] Implementation notes:

[0031] Off-Axis Parabolic Mirrors

[0032]

[0033] see figure 2 , the high-efficiency processing method of the high-precision equal-thickness off-axis aspheric mirror of the present invention comprises the following steps:

[0034] 1) Use the glass-ceramics with a diameter of Φ180mm and a thickness of 40mm as the blank of the mother mirror, use the CNC machining center to complete the shape and the corresponding positioning holes, and draw lines on the bottom of each positioning hole, and extend to the edge of the hole. The line passes through the center of the mother mirror and is used to mark the off-axis direction. The processing diagram of the coaxial mother mirror tooling is as follows image 3 As shown, the sub-mirror blank has a diam...

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Abstract

The invention discloses an efficient machining method of a high-precision equal-thickness off-axis aspheric reflector. According to the efficient machining method of the high-precision equal-thicknessoff-axis aspheric reflector, a coaxial main mirror tool is designed, so that accurate positioning and equal-thickness machining of a sub-mirror are achieved, a plurality of equal-thickness off-axis aspheric reflectors can be machined at the same time, and characteristics of being low in machining cost, high in machining precision and high in machining efficiency are achieved.

Description

technical field [0001] The invention relates to the field of optical processing, in particular to a processing method for an off-axis aspheric mirror with equal thickness. Background technique [0002] With the rapid development of modern science and technology, optical systems based on off-axis aspheric surfaces have been widely used in cutting-edge fields such as space observation, earth observation, and extreme ultraviolet lithography. Compared with the coaxial reflective optical system, the off-axis reflective optical system does not have the problem of central occlusion, has a larger effective light aperture, and can avoid the resulting diffraction phenomenon, improve the imaging quality, and effectively meet the requirements of modern optical imaging. The system has an urgent demand for large field of view, long focal length and image quality close to the diffraction limit. Therefore, off-axis reflective optical systems have gradually become the mainstream of future d...

Claims

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Application Information

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IPC IPC(8): B24B1/00B24B13/01
CPCB24B1/00B24B13/01
Inventor 胡晨吴令奇顾昊金魏朝阳邵建达
Owner SHANGHAI INST OF OPTICS & FINE MECHANICS CHINESE ACAD OF SCI
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