Two-dimensional laser autocollimator with air disturbance resistance

A two-dimensional laser and autocollimator technology, applied in instruments, optical devices, measuring devices, etc., can solve the problems of detector imaging errors and affect measurement accuracy, and achieve the effect of eliminating measurement errors.

Inactive Publication Date: 2018-05-22
CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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Problems solved by technology

[0003] During the long-distance measurement of the autocollimator, the air disturbance will directly affect the

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  • Two-dimensional laser autocollimator with air disturbance resistance
  • Two-dimensional laser autocollimator with air disturbance resistance

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[0019] In order to enable those skilled in the art to better understand the solutions of the present invention, the following will clearly and completely describe the technical solutions in the embodiments of the present invention in conjunction with the drawings in the embodiments of the present invention. Obviously, the described embodiments are only It is an embodiment of a part of the present invention, but not all embodiments. Based on the embodiments of the present invention, all other embodiments obtained by persons of ordinary skill in the art without making creative efforts shall fall within the protection scope of the present invention.

[0020] The terms "first", "second", "third", "fourth", etc. (if any) in the description and claims of the present invention and the above drawings are used to distinguish similar objects, and not necessarily Used to describe a specific sequence or sequence. It is to be understood that the terms so used are interchangeable under app...

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Abstract

The invention discloses a two-dimensional laser autocollimator with air disturbance resistance. Through realizing a fact that the light transmission areas of a lambda/4 wave plate and an attenuating plate in an optical axis are same, two light beams which are imaged on a reference surface array CCD and a measuring surface array CCD are in the same optical path. The coverage areas of the two lightbeams in the optical path are completely same. The influences of air disturbance to the two light beams are completely same. By means of a method of performing differential calculation on the images on the two CCDs, the measurement error generated by air disturbance can be eliminated, and finally the rotating angle of a reflector is accurately measured. The two-dimensional laser autocollimator issuitable for long-distance measurement by the autocollimator.

Description

technical field [0001] The invention relates to the field of precision testing and measuring instruments, and relates to a two-dimensional laser autocollimator capable of resisting air disturbance. Background technique [0002] Autocollimator is a kind of precision test and measurement instrument that uses the principle of optical self-collimation to measure small angles. Due to its high measurement accuracy, it is often used to measure the straightness of the guide rail, the flatness of the flat plate (called a flatness measuring instrument at this time), the shaking of the mechanical shaft system, etc. It can also measure the verticality with the help of the steering prism attachment. [0003] During the long-distance measurement of the autocollimator, the air disturbance will directly affect the beam wavefront, resulting in the imaging error of the detector, and finally affecting the measurement accuracy. [0004] Existing technical solution Chinese patent No. 2012101636...

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Application Information

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IPC IPC(8): G01B11/26
CPCG01B11/26
Inventor 樊孝贺张河叶王永伟
Owner CHANGCHUN INST OF OPTICS FINE MECHANICS & PHYSICS CHINESE ACAD OF SCI
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