A Photodetector Location Layout for Large Displacement Monitoring

Abstract

The invention, which relates to the photoelectric detector field, provides photoelectric detector location layout for large displacement monitoring. The layout is as follows: two square PDs are arranged at the same side of a light source; one side of each PD is adjacent to the light source; and reflected light of the light source irradiates the PDs. Large displacement monitoring of the object location is realized by using only two PDs; the outputted linear zone is extended; segmented processing is realized; and the great convenience is provided for monitoring different displacement ranges. Thehigh resolution and high sensitivity are realized; the layout is easy to control; the result processing becomes simple and conveniently; the cost is low; and current sheet processing becomes convenient. When the light intensity corresponding to the PD at the outer side is processed, the light intensity of the processed PD is compared with the light intensity of the PD at the inner side, so that the illumination influence on the result is reduced to the great extent. Diversified monitoring functions are realized only based on the analog circuit design; the output number is reduced; the need ofa large-scale digital signal for processing the array type output is avoided; and the chip area is saved.

Description

technical field [0001] The invention relates to a photodetector, in particular to a position layout of a photodetector for large-displacement monitoring in which two photodetectors are placed on the same side of a light source to realize a monitoring function. Background technique [0002] Optical position sensors use optical signals to complete the measurement of monitoring entities. The light signal emitted by the light source is reflected by the object and becomes the incident light signal which is captured by the detector. According to the change of the position of the monitoring entity, the optical signal received by the detector will also change, so as to monitor the change of the output signal, such as the displacement of the scanning micromirror (Yang Tingyan, Wen Zhiyu, Zhou Ying. High-efficiency scanning for miniature near-infrared spectrometers Grating Micromirror Design. Detection of Intense Laser and Particle Beam, 2016, 28(6): 1-6). As the core component of m...

AI Technical Summary

Problems solved by technology

Although this method has low power consumption, it results in low resolution and cannot be applied to distance position monitoring at the same time.

[0006] However, miniaturization is the main direction of MOEMS. Excessive PD arrangement greatly increases the area of ​​the chip and the volume of the system; and multiple PDs have more power consumption, and their output processing is more troublesome; a single PD If the area is too large, although the responsivity will be improved, the parasitic capacitance will greatly reduce the bandwidth

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