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Imaging a gap between sample and probe of a scanning probe microscope in substantially horizontal side view

A scanning probe and microscope technology, applied in the field of scanning probe microscopy, to achieve the effect of fast alignment and small inaccuracy

Active Publication Date: 2018-05-29
安东帕有限责任公司
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  • Summary
  • Abstract
  • Description
  • Claims
  • Application Information

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Problems solved by technology

This is also problematic when the specimen has such an inclination that some areas of the specimen exceed the depth of field of the microscope optics, so not all of the field of view can be brought into focus at once

Method used

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  • Imaging a gap between sample and probe of a scanning probe microscope in substantially horizontal side view
  • Imaging a gap between sample and probe of a scanning probe microscope in substantially horizontal side view
  • Imaging a gap between sample and probe of a scanning probe microscope in substantially horizontal side view

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Embodiment Construction

[0043] The illustrations in the figures are schematic. In different figures, similar or identical elements are provided with the same reference signs.

[0044] Before the exemplary embodiments will be described in further detail with reference to the accompanying drawings, some basic considerations upon which the exemplary embodiments of the present invention are developed will be outlined.

[0045]According to an exemplary embodiment of the present invention, there is provided a side-looking sensor for assisting in rapid coarse approach between a specimen and a probe of a scanning probe microscope. Such an embodiment may provide a reliable view of the sample-probe separation to aid in rough access operations. A preferred embodiment of the invention provides a telecentric view of the scene between the sample and the probe. This view provides good contrast even when the specimen includes a transparent layer and enables accurate measurement of the distance between the specimen...

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Abstract

A scanning probe microscope (1) for analyzing a sample (6) by moving a probe (11) and the sample (6) relative to one another, wherein the scanning probe microscope (1) comprises a detection unit (60)for detecting an image of a gap (62) between the sample (6) and the probe (11) in a substantially horizontal side view.

Description

technical field [0001] The present invention relates to a scanning probe microscope (SPM), and in particular to an atomic force microscope (AFM). The invention also relates to a method of monitoring the gap between the probe of a scanning probe microscope and a sample. Background technique [0002] In SPM or AFM, two bonding steps are usually performed before scanning the specimen surface. In a first coarse bonding step, the cantilever probe is moved from a few millimeters (or even centimeters) above the sample surface to a position less than 1 millimeter (eg, several hundred micrometers) above the sample surface. After this step, precision bonding begins: the cantilever is moved in steps of a few micrometers until it reaches its final starting position for the measurement. [0003] However, to save time, it is desirable to complete the first coarse bonding step quickly, but without moving the cantilever too quickly and without bringing the cantilever too close to the spec...

Claims

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Application Information

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Patent Type & Authority Applications(China)
IPC IPC(8): G01Q20/02
CPCG01Q20/02G01Q10/06G01Q30/02G01Q10/04G01Q20/00G01Q60/24G01Q10/00
Inventor 丹尼尔·科勒阿尔贝托·戈麦斯-卡萨多马库斯·布兰德纳
Owner 安东帕有限责任公司